JPS57207372A - Manufacture of metal oxide semiconductor integrated circuit device - Google Patents

Manufacture of metal oxide semiconductor integrated circuit device

Info

Publication number
JPS57207372A
JPS57207372A JP9182981A JP9182981A JPS57207372A JP S57207372 A JPS57207372 A JP S57207372A JP 9182981 A JP9182981 A JP 9182981A JP 9182981 A JP9182981 A JP 9182981A JP S57207372 A JPS57207372 A JP S57207372A
Authority
JP
Japan
Prior art keywords
film
thin
region
substrate
electrode wiring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9182981A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0154867B2 (enrdf_load_stackoverflow
Inventor
Eiji Nagasawa
Hidekazu Okabayashi
Mitsutaka Morimoto
Kohei Higuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP9182981A priority Critical patent/JPS57207372A/ja
Publication of JPS57207372A publication Critical patent/JPS57207372A/ja
Priority to US06/657,080 priority patent/US4551908A/en
Publication of JPH0154867B2 publication Critical patent/JPH0154867B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
    • H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
    • H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
    • H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table
    • H01L21/28518—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table the conductive layers comprising silicides

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electrodes Of Semiconductors (AREA)
JP9182981A 1981-06-15 1981-06-15 Manufacture of metal oxide semiconductor integrated circuit device Granted JPS57207372A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP9182981A JPS57207372A (en) 1981-06-15 1981-06-15 Manufacture of metal oxide semiconductor integrated circuit device
US06/657,080 US4551908A (en) 1981-06-15 1984-10-02 Process of forming electrodes and interconnections on silicon semiconductor devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9182981A JPS57207372A (en) 1981-06-15 1981-06-15 Manufacture of metal oxide semiconductor integrated circuit device

Publications (2)

Publication Number Publication Date
JPS57207372A true JPS57207372A (en) 1982-12-20
JPH0154867B2 JPH0154867B2 (enrdf_load_stackoverflow) 1989-11-21

Family

ID=14037487

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9182981A Granted JPS57207372A (en) 1981-06-15 1981-06-15 Manufacture of metal oxide semiconductor integrated circuit device

Country Status (1)

Country Link
JP (1) JPS57207372A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60193380A (ja) * 1984-03-15 1985-10-01 Nec Corp 半導体装置の製造方法
EP0802563A3 (en) * 1996-04-19 1998-09-02 Nec Corporation Method of manufacturing a semi-conductor device having a low resistance metal silicide layer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60193380A (ja) * 1984-03-15 1985-10-01 Nec Corp 半導体装置の製造方法
EP0802563A3 (en) * 1996-04-19 1998-09-02 Nec Corporation Method of manufacturing a semi-conductor device having a low resistance metal silicide layer

Also Published As

Publication number Publication date
JPH0154867B2 (enrdf_load_stackoverflow) 1989-11-21

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