JPS57204405A - Plate thickness measuring device - Google Patents

Plate thickness measuring device

Info

Publication number
JPS57204405A
JPS57204405A JP8954081A JP8954081A JPS57204405A JP S57204405 A JPS57204405 A JP S57204405A JP 8954081 A JP8954081 A JP 8954081A JP 8954081 A JP8954081 A JP 8954081A JP S57204405 A JPS57204405 A JP S57204405A
Authority
JP
Japan
Prior art keywords
vibration
period
projected
focused
reverse side
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8954081A
Other languages
Japanese (ja)
Other versions
JPS618362B2 (en
Inventor
Hiroshi Makihira
Yoshisada Oshida
Nobuhiko Aoki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8954081A priority Critical patent/JPS57204405A/en
Publication of JPS57204405A publication Critical patent/JPS57204405A/en
Publication of JPS618362B2 publication Critical patent/JPS618362B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material

Abstract

PURPOSE:To get rid of influence due to vibration of a focal control driving device, by using a storage-type photoelectric converting element, in case of measurment of thickness by automatic focal control which has used a pattern projected on the surface and the reverse side to be measured. CONSTITUTION:Patterns 2, 2' are projected on bodh water surfaces by opposed objective lenses 4, 4' on the surface and the reverse side of a silicon wafer 9, respectively, these projected patterns are also image-formed on image pickup devices 8, 8' by objective lenses, and they are focused by lens driving mechanisms 5, 5' so that contrast of these images becomes maximum. Thickness of the wafer is detected from a position of the lenses which have been focused. When the lens is finely moved by a driving motor, a position Z shows vibration of a period TS, therefore, when a storage-type photodiode two-dimensional array sensor is used and its scanning period is made to coincide with the vibration period TS, the quantity of incident light of the period t1-t2 of a picture signal 6B is integrated by a scanning start signal 6A, therefore, a variation of the quantity of light by vibration is averaged.
JP8954081A 1981-06-12 1981-06-12 Plate thickness measuring device Granted JPS57204405A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8954081A JPS57204405A (en) 1981-06-12 1981-06-12 Plate thickness measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8954081A JPS57204405A (en) 1981-06-12 1981-06-12 Plate thickness measuring device

Publications (2)

Publication Number Publication Date
JPS57204405A true JPS57204405A (en) 1982-12-15
JPS618362B2 JPS618362B2 (en) 1986-03-13

Family

ID=13973642

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8954081A Granted JPS57204405A (en) 1981-06-12 1981-06-12 Plate thickness measuring device

Country Status (1)

Country Link
JP (1) JPS57204405A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0293305A (en) * 1988-09-30 1990-04-04 Canon Inc Positioning apparatus

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03122758A (en) * 1989-10-05 1991-05-24 Nec Corp Document edition control system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0293305A (en) * 1988-09-30 1990-04-04 Canon Inc Positioning apparatus

Also Published As

Publication number Publication date
JPS618362B2 (en) 1986-03-13

Similar Documents

Publication Publication Date Title
US4467195A (en) Information detecting apparatus
JPS54126023A (en) Optical device
JPS5764217A (en) Automatic focusing camera
JPS5780546A (en) Detecting device for foreign substance
JPH0157891B2 (en)
US4270047A (en) Information detecting apparatus
JPS57108810A (en) Focus detector
JPS57204405A (en) Plate thickness measuring device
JPS57212406A (en) Method and device for focusing
JPH01106290A (en) Counter for the number of wafers
JPS554074A (en) Original end detecting method
JPS57113311A (en) Measuring device for surface coarseness of object
US4229087A (en) Focusing optical system for single-lens reflex
JPH034155B2 (en)
JPS6482860A (en) Method for forming reference surface of solid-state image pickup device fitting member
JPS6453686A (en) Solid-state image pick-up device
JPS54136888A (en) Surface defect detecting device
JPS62120717U (en)
JPS57138624A (en) Photometric device for camera
JPS5767902A (en) Focus detecting method
JPS5587115A (en) Focus detector
JPS5727244A (en) Distance measuring device of camera
JPS5654418A (en) Focusing detection system
JPS5749929A (en) Photometric device of camera
JPH04137659U (en) Close-contact image sensor