JPS57200559A - Apparatus and method for forming optical thin film - Google Patents

Apparatus and method for forming optical thin film

Info

Publication number
JPS57200559A
JPS57200559A JP56083981A JP8398181A JPS57200559A JP S57200559 A JPS57200559 A JP S57200559A JP 56083981 A JP56083981 A JP 56083981A JP 8398181 A JP8398181 A JP 8398181A JP S57200559 A JPS57200559 A JP S57200559A
Authority
JP
Japan
Prior art keywords
base plate
thin film
reach
monitor
shutters
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56083981A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6144153B2 (cs
Inventor
Eiji Mishiro
Hiroki Nakajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP56083981A priority Critical patent/JPS57200559A/ja
Publication of JPS57200559A publication Critical patent/JPS57200559A/ja
Publication of JPS6144153B2 publication Critical patent/JPS6144153B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
    • C23C14/547—Controlling the film thickness or evaporation rate using measurement on deposited material using optical methods

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Physical Vapour Deposition (AREA)
JP56083981A 1981-06-01 1981-06-01 Apparatus and method for forming optical thin film Granted JPS57200559A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56083981A JPS57200559A (en) 1981-06-01 1981-06-01 Apparatus and method for forming optical thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56083981A JPS57200559A (en) 1981-06-01 1981-06-01 Apparatus and method for forming optical thin film

Publications (2)

Publication Number Publication Date
JPS57200559A true JPS57200559A (en) 1982-12-08
JPS6144153B2 JPS6144153B2 (cs) 1986-10-01

Family

ID=13817708

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56083981A Granted JPS57200559A (en) 1981-06-01 1981-06-01 Apparatus and method for forming optical thin film

Country Status (1)

Country Link
JP (1) JPS57200559A (cs)

Also Published As

Publication number Publication date
JPS6144153B2 (cs) 1986-10-01

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