JPS57200012A - Luminaire and luminaire for exposing device - Google Patents

Luminaire and luminaire for exposing device

Info

Publication number
JPS57200012A
JPS57200012A JP56084349A JP8434981A JPS57200012A JP S57200012 A JPS57200012 A JP S57200012A JP 56084349 A JP56084349 A JP 56084349A JP 8434981 A JP8434981 A JP 8434981A JP S57200012 A JPS57200012 A JP S57200012A
Authority
JP
Japan
Prior art keywords
light source
arc
spot light
sigma
focus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56084349A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6219723B2 (enrdf_load_stackoverflow
Inventor
Yoshisada Oshida
Masataka Shiba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP56084349A priority Critical patent/JPS57200012A/ja
Priority to DE8282104828T priority patent/DE3268933D1/de
Priority to EP82104828A priority patent/EP0066295B1/en
Priority to US06/384,679 priority patent/US4458302A/en
Publication of JPS57200012A publication Critical patent/JPS57200012A/ja
Publication of JPS6219723B2 publication Critical patent/JPS6219723B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70358—Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G02B19/0019—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having reflective surfaces only (e.g. louvre systems, systems with multiple planar reflectors)
    • G02B19/0023—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having reflective surfaces only (e.g. louvre systems, systems with multiple planar reflectors) at least one surface having optical power
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70233—Optical aspects of catoptric systems, i.e. comprising only reflective elements, e.g. extreme ultraviolet [EUV] projection systems

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Lenses (AREA)
  • Light Sources And Details Of Projection-Printing Devices (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP56084349A 1981-06-03 1981-06-03 Luminaire and luminaire for exposing device Granted JPS57200012A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP56084349A JPS57200012A (en) 1981-06-03 1981-06-03 Luminaire and luminaire for exposing device
DE8282104828T DE3268933D1 (en) 1981-06-03 1982-06-02 Reflection type optical focusing apparatus
EP82104828A EP0066295B1 (en) 1981-06-03 1982-06-02 Reflection type optical focusing apparatus
US06/384,679 US4458302A (en) 1981-06-03 1982-06-02 Reflection type optical focusing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56084349A JPS57200012A (en) 1981-06-03 1981-06-03 Luminaire and luminaire for exposing device

Publications (2)

Publication Number Publication Date
JPS57200012A true JPS57200012A (en) 1982-12-08
JPS6219723B2 JPS6219723B2 (enrdf_load_stackoverflow) 1987-04-30

Family

ID=13828033

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56084349A Granted JPS57200012A (en) 1981-06-03 1981-06-03 Luminaire and luminaire for exposing device

Country Status (1)

Country Link
JP (1) JPS57200012A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH075363A (ja) * 1993-06-16 1995-01-10 Tech Res & Dev Inst Of Japan Def Agency 非同軸共焦点多面反射光学系
US5390044A (en) * 1992-06-03 1995-02-14 Matsushita Electric Industrial Co., Ltd. Circular arc illumination apparatus
US5416630A (en) * 1992-06-03 1995-05-16 Matsushita Electric Industrial Co., Ltd. Circular arc illumination apparatus
US5495306A (en) * 1993-06-23 1996-02-27 Sharp Kabushiki Kaisha Projector

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54123876A (en) * 1978-03-18 1979-09-26 Canon Inc Image forming optical system

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54123876A (en) * 1978-03-18 1979-09-26 Canon Inc Image forming optical system

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5390044A (en) * 1992-06-03 1995-02-14 Matsushita Electric Industrial Co., Ltd. Circular arc illumination apparatus
US5416630A (en) * 1992-06-03 1995-05-16 Matsushita Electric Industrial Co., Ltd. Circular arc illumination apparatus
JPH075363A (ja) * 1993-06-16 1995-01-10 Tech Res & Dev Inst Of Japan Def Agency 非同軸共焦点多面反射光学系
US5495306A (en) * 1993-06-23 1996-02-27 Sharp Kabushiki Kaisha Projector

Also Published As

Publication number Publication date
JPS6219723B2 (enrdf_load_stackoverflow) 1987-04-30

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