JPS5719947A - Electromagnetic coil - Google Patents

Electromagnetic coil

Info

Publication number
JPS5719947A
JPS5719947A JP9273880A JP9273880A JPS5719947A JP S5719947 A JPS5719947 A JP S5719947A JP 9273880 A JP9273880 A JP 9273880A JP 9273880 A JP9273880 A JP 9273880A JP S5719947 A JPS5719947 A JP S5719947A
Authority
JP
Japan
Prior art keywords
bobbin
units
coil
unit
water cooling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9273880A
Other languages
Japanese (ja)
Inventor
Isao Matsui
Moriki Kubozoe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9273880A priority Critical patent/JPS5719947A/en
Publication of JPS5719947A publication Critical patent/JPS5719947A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Coils Of Transformers For General Uses (AREA)

Abstract

PURPOSE:To improve the insulation and to produce a small and powerful electromagnetic coil, by spliting a bobbin into a plurality of bobbin units then mounting coil units between the flange section of each bobbin and laminating and integrating with an epoxy resin. CONSTITUTION:An electromacnetic coil 10 is constructed such that copper bobbin units 2-4 engaging each other are laminated on the lower face of a copper cooling board 1 fixed with a water cooling pipe 8. The bobbin unit 2 has a cylindrical section engaging with the cooling board 1 and a flange section burried with the water cooling pipe 8, while the bobbin unit 3 has a cylindrical section engaging with the bobbin units 2 and 4 and a flange section burried with the water cooling pipe 8. A coil unit 5 is mounted between the water cooling board 1 and the bobbin unit 2 while a coil unit 6 is mounted between the bobbin units 2, 3 and a coil unit 7 is mounted between the flange sections of the bobbin units 3, 4. The circumference and the flange section of the coil units 5, 6, 7 are covered with the epoxy resin 9.
JP9273880A 1980-07-09 1980-07-09 Electromagnetic coil Pending JPS5719947A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9273880A JPS5719947A (en) 1980-07-09 1980-07-09 Electromagnetic coil

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9273880A JPS5719947A (en) 1980-07-09 1980-07-09 Electromagnetic coil

Publications (1)

Publication Number Publication Date
JPS5719947A true JPS5719947A (en) 1982-02-02

Family

ID=14062753

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9273880A Pending JPS5719947A (en) 1980-07-09 1980-07-09 Electromagnetic coil

Country Status (1)

Country Link
JP (1) JPS5719947A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0461366A2 (en) * 1990-05-17 1991-12-18 Etec Systems, Inc. Thermally stable magnetic deflection assembly and method of making same
WO2007060017A2 (en) * 2005-11-28 2007-05-31 Carl Zeiss Smt Ag Particle-optical component
EP1943658A2 (en) * 2005-09-30 2008-07-16 Applied Materials, Inc. Cooling module for charged particle beam column elements
JP2013082178A (en) * 2011-10-12 2013-05-09 Sumitomo Heavy Ind Ltd Injection molding machine

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0461366A2 (en) * 1990-05-17 1991-12-18 Etec Systems, Inc. Thermally stable magnetic deflection assembly and method of making same
US5136166A (en) * 1990-05-17 1992-08-04 Etec Systems, Inc. Temperature stable magnetic deflection assembly
EP1943658A2 (en) * 2005-09-30 2008-07-16 Applied Materials, Inc. Cooling module for charged particle beam column elements
EP1943658A4 (en) * 2005-09-30 2010-06-16 Applied Materials Inc Cooling module for charged particle beam column elements
WO2007060017A2 (en) * 2005-11-28 2007-05-31 Carl Zeiss Smt Ag Particle-optical component
WO2007060017A3 (en) * 2005-11-28 2007-08-23 Zeiss Carl Smt Ag Particle-optical component
JP2009517816A (en) * 2005-11-28 2009-04-30 カール・ツァイス・エスエムティー・アーゲー Particle optics
US10622184B2 (en) 2005-11-28 2020-04-14 Carl Zeiss Microscopy Gmbh Objective lens arrangement usable in particle-optical systems
US11527379B2 (en) 2005-11-28 2022-12-13 Carl Zeiss Microscopy Gmbh Objective lens arrangement usable in particle-optical systems
JP2013082178A (en) * 2011-10-12 2013-05-09 Sumitomo Heavy Ind Ltd Injection molding machine
TWI607852B (en) * 2011-10-12 2017-12-11 住友重機械工業股份有限公司 Injection molding machine

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