JPS57194256A - Sputtering device - Google Patents
Sputtering deviceInfo
- Publication number
- JPS57194256A JPS57194256A JP7875181A JP7875181A JPS57194256A JP S57194256 A JPS57194256 A JP S57194256A JP 7875181 A JP7875181 A JP 7875181A JP 7875181 A JP7875181 A JP 7875181A JP S57194256 A JPS57194256 A JP S57194256A
- Authority
- JP
- Japan
- Prior art keywords
- targets
- magnets
- annular shape
- use efficiency
- different polarities
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
- H01J37/3405—Magnetron sputtering
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7875181A JPS5943547B2 (ja) | 1981-05-26 | 1981-05-26 | スパツタリング装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7875181A JPS5943547B2 (ja) | 1981-05-26 | 1981-05-26 | スパツタリング装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57194256A true JPS57194256A (en) | 1982-11-29 |
JPS5943547B2 JPS5943547B2 (ja) | 1984-10-23 |
Family
ID=13670591
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7875181A Expired JPS5943547B2 (ja) | 1981-05-26 | 1981-05-26 | スパツタリング装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5943547B2 (ja) |
-
1981
- 1981-05-26 JP JP7875181A patent/JPS5943547B2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5943547B2 (ja) | 1984-10-23 |
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