JPS57190203A - Device for reading optical scale - Google Patents

Device for reading optical scale

Info

Publication number
JPS57190203A
JPS57190203A JP56075582A JP7558281A JPS57190203A JP S57190203 A JPS57190203 A JP S57190203A JP 56075582 A JP56075582 A JP 56075582A JP 7558281 A JP7558281 A JP 7558281A JP S57190203 A JPS57190203 A JP S57190203A
Authority
JP
Japan
Prior art keywords
lens
scale
light
projected
light receiving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56075582A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6126006B2 (enrdf_load_html_response
Inventor
Hideto Iwaoka
Koji Akiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Yokogawa Hokushin Electric Corp
Yokogawa Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp, Yokogawa Hokushin Electric Corp, Yokogawa Electric Works Ltd filed Critical Yokogawa Electric Corp
Priority to JP56075582A priority Critical patent/JPS57190203A/ja
Publication of JPS57190203A publication Critical patent/JPS57190203A/ja
Publication of JPS6126006B2 publication Critical patent/JPS6126006B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP56075582A 1981-05-19 1981-05-19 Device for reading optical scale Granted JPS57190203A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56075582A JPS57190203A (en) 1981-05-19 1981-05-19 Device for reading optical scale

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56075582A JPS57190203A (en) 1981-05-19 1981-05-19 Device for reading optical scale

Publications (2)

Publication Number Publication Date
JPS57190203A true JPS57190203A (en) 1982-11-22
JPS6126006B2 JPS6126006B2 (enrdf_load_html_response) 1986-06-18

Family

ID=13580322

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56075582A Granted JPS57190203A (en) 1981-05-19 1981-05-19 Device for reading optical scale

Country Status (1)

Country Link
JP (1) JPS57190203A (enrdf_load_html_response)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4868385A (en) * 1985-07-10 1989-09-19 Canon Kabushiki Kaisha Rotating state detection apparatus using a plurality of light beams
US4967072A (en) * 1984-09-05 1990-10-30 Canon Kabushiki Kaisha Interferometric rotating condition detection apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4967072A (en) * 1984-09-05 1990-10-30 Canon Kabushiki Kaisha Interferometric rotating condition detection apparatus
US4868385A (en) * 1985-07-10 1989-09-19 Canon Kabushiki Kaisha Rotating state detection apparatus using a plurality of light beams

Also Published As

Publication number Publication date
JPS6126006B2 (enrdf_load_html_response) 1986-06-18

Similar Documents

Publication Publication Date Title
SU1450761A3 (ru) Устройство дл измерени относительных перемещений двух объектов
US3973119A (en) Device for determining the displacement of a machine tool component
GB1516536A (en) Measuring apparatus
EP0096448B1 (en) Apparatus for determing angular displacements of an object
JPS58191907A (ja) 移動量測定方法
US4395123A (en) Interferometric angle monitor
JPS57190202A (en) Device for reading optical scale
JPS57190203A (en) Device for reading optical scale
JPS5745406A (en) Three-dimensional coordinate measuring device
US4115008A (en) Displacement measuring apparatus
JPS632323B2 (enrdf_load_html_response)
JPS57199909A (en) Distance measuring device
SU968603A1 (ru) Датчик линейных перемещений
SU1368633A1 (ru) Фотоэлектрический автоколлиматор
SU1299319A1 (ru) Устройство дл измерени абсолютного значени ускорени силы т жести
SU1092546A1 (ru) Фотоэлектрический преобразователь перемещени в код
RU1768921C (ru) Устройство дл измерений перемещений светового п тна
SU411296A1 (enrdf_load_html_response)
SU1534298A1 (ru) Устройство дл измерени перемещени объекта
SU932220A1 (ru) Устройство дл регистрации смещени объекта
SU1281950A1 (ru) Устройство дл определени положени фокальной плоскости объектива
SU1567883A1 (ru) Устройство дл контрол пр молинейности
SU1649253A1 (ru) Триангул ционный способ измерени перемещений объекта
SU1523907A1 (ru) Сферометр
SU1434242A1 (ru) Устройство дл измерени толщины пленок