JPS6126006B2 - - Google Patents
Info
- Publication number
- JPS6126006B2 JPS6126006B2 JP56075582A JP7558281A JPS6126006B2 JP S6126006 B2 JPS6126006 B2 JP S6126006B2 JP 56075582 A JP56075582 A JP 56075582A JP 7558281 A JP7558281 A JP 7558281A JP S6126006 B2 JPS6126006 B2 JP S6126006B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- lens
- scale
- half mirror
- receives
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56075582A JPS57190203A (en) | 1981-05-19 | 1981-05-19 | Device for reading optical scale |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56075582A JPS57190203A (en) | 1981-05-19 | 1981-05-19 | Device for reading optical scale |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57190203A JPS57190203A (en) | 1982-11-22 |
JPS6126006B2 true JPS6126006B2 (enrdf_load_html_response) | 1986-06-18 |
Family
ID=13580322
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56075582A Granted JPS57190203A (en) | 1981-05-19 | 1981-05-19 | Device for reading optical scale |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57190203A (enrdf_load_html_response) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4967072A (en) * | 1984-09-05 | 1990-10-30 | Canon Kabushiki Kaisha | Interferometric rotating condition detection apparatus |
JPS6212814A (ja) * | 1985-07-10 | 1987-01-21 | Canon Inc | ロ−タリ−エンコ−ダ− |
-
1981
- 1981-05-19 JP JP56075582A patent/JPS57190203A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS57190203A (en) | 1982-11-22 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP3028716B2 (ja) | 光学式変位センサ | |
US9175987B2 (en) | Displacement detecting device | |
JPH06229781A (ja) | 変位測定装置 | |
JPH0755940A (ja) | レーザードップラー速度計 | |
JPH048724B2 (enrdf_load_html_response) | ||
JPH0670592B2 (ja) | コンパクト連続波波面センサー | |
JPS58191907A (ja) | 移動量測定方法 | |
JP3937596B2 (ja) | 変位情報測定装置 | |
JPS6126006B2 (enrdf_load_html_response) | ||
JPS6126005B2 (enrdf_load_html_response) | ||
JPH046884B2 (enrdf_load_html_response) | ||
JPS632323B2 (enrdf_load_html_response) | ||
US6297497B1 (en) | Method and device for determining the direction in which an object is located | |
JP3501529B2 (ja) | 光学式変位測定装置 | |
JPS6128923B2 (enrdf_load_html_response) | ||
EP0486050B1 (en) | Method and apparatus for measuring displacement | |
JP2670457B2 (ja) | 零点位置検出装置 | |
JP2911516B2 (ja) | レーザードップラー速度計 | |
JPH02188907A (ja) | 面位置検出装置 | |
JPS6213603B2 (enrdf_load_html_response) | ||
JPS6234243Y2 (enrdf_load_html_response) | ||
JP2688988B2 (ja) | 光学式測定装置 | |
JPS6244332Y2 (enrdf_load_html_response) | ||
JPH0428014Y2 (enrdf_load_html_response) | ||
JPS6139290Y2 (enrdf_load_html_response) |