JPS57189442A - Electron-optic lens-barrel - Google Patents

Electron-optic lens-barrel

Info

Publication number
JPS57189442A
JPS57189442A JP7455581A JP7455581A JPS57189442A JP S57189442 A JPS57189442 A JP S57189442A JP 7455581 A JP7455581 A JP 7455581A JP 7455581 A JP7455581 A JP 7455581A JP S57189442 A JPS57189442 A JP S57189442A
Authority
JP
Japan
Prior art keywords
lenses
electron
condenser lens
converged
cpu
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7455581A
Other languages
Japanese (ja)
Inventor
Mamoru Nakasuji
Sadao Sasaki
Ryoichi Yoshikawa
Mineo Goto
Shunichi Sano
Tadahiro Takigawa
Kanji Wada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP7455581A priority Critical patent/JPS57189442A/en
Publication of JPS57189442A publication Critical patent/JPS57189442A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)

Abstract

PURPOSE:To control current density easily and in a short time and improve control accuracy remarkably by varying the two adjacent excitation conditions of each condenser lens and variably controlling the diameter of a crossover image which is formed on the principal surface of an objective lens. CONSTITUTION:The electron beam emitted from an electron gun 1 is converged through the first and second condenser lenses 2 and 3 and the shaped beam is converged through the third condenser lens 5. This electron beam is irradiated and projected on a sample 9 through the fourth condenser lens 7 and an objective lens 8. On the other hand, a Farady cup 10 which measures the beam current is provided on the same flat surface and this detection signal is sent to a CPU 13 through an amplifier 11 and an interface 12. The CPU 13 operates each excitation current of the first and second lenses 2 and 3 depending on the detection signal, sends the operation result to the lenses 2 and 3 through the interface, and controls a computer.
JP7455581A 1981-05-18 1981-05-18 Electron-optic lens-barrel Pending JPS57189442A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7455581A JPS57189442A (en) 1981-05-18 1981-05-18 Electron-optic lens-barrel

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7455581A JPS57189442A (en) 1981-05-18 1981-05-18 Electron-optic lens-barrel

Publications (1)

Publication Number Publication Date
JPS57189442A true JPS57189442A (en) 1982-11-20

Family

ID=13550591

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7455581A Pending JPS57189442A (en) 1981-05-18 1981-05-18 Electron-optic lens-barrel

Country Status (1)

Country Link
JP (1) JPS57189442A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61125127A (en) * 1984-11-22 1986-06-12 Toshiba Mach Co Ltd Electron beam exposure device
EP3379556A1 (en) * 2017-03-20 2018-09-26 TESCAN Brno, s.r.o. Scanning transmission electron microscope with a condenser objective system and a method of use thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61125127A (en) * 1984-11-22 1986-06-12 Toshiba Mach Co Ltd Electron beam exposure device
EP3379556A1 (en) * 2017-03-20 2018-09-26 TESCAN Brno, s.r.o. Scanning transmission electron microscope with a condenser objective system and a method of use thereof

Similar Documents

Publication Publication Date Title
US3291959A (en) Procedure and equipment for the automatic focussing of the charge carrier beam in devices for the working of materials by means of a charge carrier beam
KR860008582A (en) Focused ion beam treatment device and method of using the same
JPS5632655A (en) Electron beam device
EP0105694A2 (en) Charged particle beam exposure apparatus
US3601575A (en) Method and apparatus for viewing the impact spot of a charge carrier beam
EP0390118A3 (en) Field emission scanning electron microsope and method of controlling beam aperture angle
JPS57189442A (en) Electron-optic lens-barrel
US4661702A (en) Primary ion beam raster gating technique for secondary ion mass spectrometer system
JPS5727551A (en) Electron microscope
JPS5767912A (en) Axis aligning method of electronic optical lens barrel
JPS57210549A (en) Method of correction attendant on deflection
JPS6476655A (en) Radiation quantity stabilizing device for electron microscope
JPS5768031A (en) Axis aligning mechanism for electron beam exposure device
JPS62184754A (en) Focused ion beam device
JPS57122521A (en) Electro-optical body tube
JPH073772B2 (en) Electronic beam focusing device
JPS56116259A (en) Transmissive electron microscope
JPS56152145A (en) Electron microscope
JPS56130921A (en) Adjusting method of axis of charged particle beam
JPH0691001B2 (en) Charge beam control method
JPS5651826A (en) Image drawing apparatus by electron beam
JPS5548929A (en) Method of drawing by electron beam
JPS56142637A (en) Drawing instrument by electron ray
JPS6431008A (en) Measuring apparatus for length by electron beam
JPS53128975A (en) Automatic focus control device for scanning type electron beam device and others