JPS57188494A - Manufacture of blank carbon body for pulling up crystal - Google Patents

Manufacture of blank carbon body for pulling up crystal

Info

Publication number
JPS57188494A
JPS57188494A JP56070681A JP7068181A JPS57188494A JP S57188494 A JPS57188494 A JP S57188494A JP 56070681 A JP56070681 A JP 56070681A JP 7068181 A JP7068181 A JP 7068181A JP S57188494 A JPS57188494 A JP S57188494A
Authority
JP
Japan
Prior art keywords
carbon body
pulling
crystal
blank
acid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56070681A
Other languages
Japanese (ja)
Inventor
Hideki Matsunaga
Hiroshi Endo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP56070681A priority Critical patent/JPS57188494A/en
Publication of JPS57188494A publication Critical patent/JPS57188494A/en
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Ceramic Products (AREA)

Abstract

PURPOSE: To obtain a blank carbon body almost free from impurities and suitable for use as a member for pulling up a semiconductor crystal by heating a blank carbon body for pulling up a crystal molded into a final shape in a mixed acid soln. to remove impurities and by drying the carbon body.
CONSTITUTION: A blank carbon body molded into a prescribed final shape is immersed in a mixed acid soln. composed of hydrofluoric acid, nitric acid and hydrochloric acid in a suitable mixing ratio and heated to ≤120, especially 70W 1,000°C. By maintaining this state, impurities such as Fe, Al and V contained in the carbon body are discharged into the mixed acid by the respiration of the carbon body and removed by bonding to the acid by chemical reaction. The treated carbon body is washed in water and dried at ≥about 100, especially 100W 160°C to form a blank carbon body with very low impurity content for pulling up a crystal. The resulting carbon body is very effective in use as a member for pulling up a semiconductor crystal.
COPYRIGHT: (C)1982,JPO&Japio
JP56070681A 1981-05-13 1981-05-13 Manufacture of blank carbon body for pulling up crystal Pending JPS57188494A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56070681A JPS57188494A (en) 1981-05-13 1981-05-13 Manufacture of blank carbon body for pulling up crystal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56070681A JPS57188494A (en) 1981-05-13 1981-05-13 Manufacture of blank carbon body for pulling up crystal

Publications (1)

Publication Number Publication Date
JPS57188494A true JPS57188494A (en) 1982-11-19

Family

ID=13438626

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56070681A Pending JPS57188494A (en) 1981-05-13 1981-05-13 Manufacture of blank carbon body for pulling up crystal

Country Status (1)

Country Link
JP (1) JPS57188494A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02188489A (en) * 1989-01-13 1990-07-24 Mitsubishi Metal Corp Method for regenerating quartz crucible for pulling up silicon single crystal
JPH0489388A (en) * 1990-07-27 1992-03-23 Shin Etsu Handotai Co Ltd Graphite material for pulling up single crystal

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02188489A (en) * 1989-01-13 1990-07-24 Mitsubishi Metal Corp Method for regenerating quartz crucible for pulling up silicon single crystal
JPH0489388A (en) * 1990-07-27 1992-03-23 Shin Etsu Handotai Co Ltd Graphite material for pulling up single crystal

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