JPS57188494A - Manufacture of blank carbon body for pulling up crystal - Google Patents
Manufacture of blank carbon body for pulling up crystalInfo
- Publication number
- JPS57188494A JPS57188494A JP56070681A JP7068181A JPS57188494A JP S57188494 A JPS57188494 A JP S57188494A JP 56070681 A JP56070681 A JP 56070681A JP 7068181 A JP7068181 A JP 7068181A JP S57188494 A JPS57188494 A JP S57188494A
- Authority
- JP
- Japan
- Prior art keywords
- carbon body
- pulling
- crystal
- blank
- acid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Ceramic Products (AREA)
Abstract
PURPOSE: To obtain a blank carbon body almost free from impurities and suitable for use as a member for pulling up a semiconductor crystal by heating a blank carbon body for pulling up a crystal molded into a final shape in a mixed acid soln. to remove impurities and by drying the carbon body.
CONSTITUTION: A blank carbon body molded into a prescribed final shape is immersed in a mixed acid soln. composed of hydrofluoric acid, nitric acid and hydrochloric acid in a suitable mixing ratio and heated to ≤120, especially 70W 1,000°C. By maintaining this state, impurities such as Fe, Al and V contained in the carbon body are discharged into the mixed acid by the respiration of the carbon body and removed by bonding to the acid by chemical reaction. The treated carbon body is washed in water and dried at ≥about 100, especially 100W 160°C to form a blank carbon body with very low impurity content for pulling up a crystal. The resulting carbon body is very effective in use as a member for pulling up a semiconductor crystal.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56070681A JPS57188494A (en) | 1981-05-13 | 1981-05-13 | Manufacture of blank carbon body for pulling up crystal |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56070681A JPS57188494A (en) | 1981-05-13 | 1981-05-13 | Manufacture of blank carbon body for pulling up crystal |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57188494A true JPS57188494A (en) | 1982-11-19 |
Family
ID=13438626
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56070681A Pending JPS57188494A (en) | 1981-05-13 | 1981-05-13 | Manufacture of blank carbon body for pulling up crystal |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57188494A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02188489A (en) * | 1989-01-13 | 1990-07-24 | Mitsubishi Metal Corp | Method for regenerating quartz crucible for pulling up silicon single crystal |
JPH0489388A (en) * | 1990-07-27 | 1992-03-23 | Shin Etsu Handotai Co Ltd | Graphite material for pulling up single crystal |
-
1981
- 1981-05-13 JP JP56070681A patent/JPS57188494A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02188489A (en) * | 1989-01-13 | 1990-07-24 | Mitsubishi Metal Corp | Method for regenerating quartz crucible for pulling up silicon single crystal |
JPH0489388A (en) * | 1990-07-27 | 1992-03-23 | Shin Etsu Handotai Co Ltd | Graphite material for pulling up single crystal |
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