JPS57185713A - Manufacture for surface acoustic wave reed screen shaped converter - Google Patents
Manufacture for surface acoustic wave reed screen shaped converterInfo
- Publication number
- JPS57185713A JPS57185713A JP7045981A JP7045981A JPS57185713A JP S57185713 A JPS57185713 A JP S57185713A JP 7045981 A JP7045981 A JP 7045981A JP 7045981 A JP7045981 A JP 7045981A JP S57185713 A JPS57185713 A JP S57185713A
- Authority
- JP
- Japan
- Prior art keywords
- resist
- openings
- coated
- auxiliary layer
- manufacture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 235000014676 Phragmites communis Nutrition 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 238000010897 surface acoustic wave method Methods 0.000 title 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 abstract 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 2
- 229910052782 aluminium Inorganic materials 0.000 abstract 2
- 239000007772 electrode material Substances 0.000 abstract 2
- 238000005530 etching Methods 0.000 abstract 2
- 229910052719 titanium Inorganic materials 0.000 abstract 2
- 239000010936 titanium Substances 0.000 abstract 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 1
- 238000000151 deposition Methods 0.000 abstract 1
- 238000010894 electron beam technology Methods 0.000 abstract 1
- 229910010272 inorganic material Inorganic materials 0.000 abstract 1
- 239000011147 inorganic material Substances 0.000 abstract 1
- 238000009413 insulation Methods 0.000 abstract 1
- 238000010884 ion-beam technique Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 239000011368 organic material Substances 0.000 abstract 1
- 230000003647 oxidation Effects 0.000 abstract 1
- 238000007254 oxidation reaction Methods 0.000 abstract 1
- 229910052760 oxygen Inorganic materials 0.000 abstract 1
- 239000001301 oxygen Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7045981A JPS57185713A (en) | 1981-05-11 | 1981-05-11 | Manufacture for surface acoustic wave reed screen shaped converter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7045981A JPS57185713A (en) | 1981-05-11 | 1981-05-11 | Manufacture for surface acoustic wave reed screen shaped converter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57185713A true JPS57185713A (en) | 1982-11-16 |
| JPH0161250B2 JPH0161250B2 (enrdf_load_stackoverflow) | 1989-12-27 |
Family
ID=13432114
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7045981A Granted JPS57185713A (en) | 1981-05-11 | 1981-05-11 | Manufacture for surface acoustic wave reed screen shaped converter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57185713A (enrdf_load_stackoverflow) |
-
1981
- 1981-05-11 JP JP7045981A patent/JPS57185713A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0161250B2 (enrdf_load_stackoverflow) | 1989-12-27 |
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