JPS57181157A - Manufacture of semiconductor integrated circuit device - Google Patents

Manufacture of semiconductor integrated circuit device

Info

Publication number
JPS57181157A
JPS57181157A JP56065211A JP6521181A JPS57181157A JP S57181157 A JPS57181157 A JP S57181157A JP 56065211 A JP56065211 A JP 56065211A JP 6521181 A JP6521181 A JP 6521181A JP S57181157 A JPS57181157 A JP S57181157A
Authority
JP
Japan
Prior art keywords
layer
poly
mask
implanted
oxide film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56065211A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0123952B2 (enrdf_load_stackoverflow
Inventor
Mineo Shimizu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP56065211A priority Critical patent/JPS57181157A/ja
Publication of JPS57181157A publication Critical patent/JPS57181157A/ja
Publication of JPH0123952B2 publication Critical patent/JPH0123952B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/30—Devices controlled by electric currents or voltages
    • H10D48/32—Devices controlled by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H10D48/34—Bipolar devices
    • H10D48/345—Bipolar transistors having ohmic electrodes on emitter-like, base-like, and collector-like regions

Landscapes

  • Bipolar Integrated Circuits (AREA)
  • Bipolar Transistors (AREA)
JP56065211A 1981-05-01 1981-05-01 Manufacture of semiconductor integrated circuit device Granted JPS57181157A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56065211A JPS57181157A (en) 1981-05-01 1981-05-01 Manufacture of semiconductor integrated circuit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56065211A JPS57181157A (en) 1981-05-01 1981-05-01 Manufacture of semiconductor integrated circuit device

Publications (2)

Publication Number Publication Date
JPS57181157A true JPS57181157A (en) 1982-11-08
JPH0123952B2 JPH0123952B2 (enrdf_load_stackoverflow) 1989-05-09

Family

ID=13280346

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56065211A Granted JPS57181157A (en) 1981-05-01 1981-05-01 Manufacture of semiconductor integrated circuit device

Country Status (1)

Country Link
JP (1) JPS57181157A (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5541738A (en) * 1978-09-20 1980-03-24 Hitachi Ltd Preparation of semiconductor device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5541738A (en) * 1978-09-20 1980-03-24 Hitachi Ltd Preparation of semiconductor device

Also Published As

Publication number Publication date
JPH0123952B2 (enrdf_load_stackoverflow) 1989-05-09

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