JPS5717849A - Thin film gas sensor - Google Patents

Thin film gas sensor

Info

Publication number
JPS5717849A
JPS5717849A JP7560881A JP7560881A JPS5717849A JP S5717849 A JPS5717849 A JP S5717849A JP 7560881 A JP7560881 A JP 7560881A JP 7560881 A JP7560881 A JP 7560881A JP S5717849 A JPS5717849 A JP S5717849A
Authority
JP
Japan
Prior art keywords
thin film
gas sensor
film gas
sensor
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7560881A
Other languages
English (en)
Japanese (ja)
Inventor
Toraiteingaa Ruutouitsuhi
Teitsushiyaa Peeta
Shiyunaidaagume Buritsugitsute
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Corp
Original Assignee
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Corp filed Critical Siemens Corp
Publication of JPS5717849A publication Critical patent/JPS5717849A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP7560881A 1980-05-21 1981-05-19 Thin film gas sensor Pending JPS5717849A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3019387A DE3019387C2 (de) 1980-05-21 1980-05-21 Dünnschicht-Halbleiter-Gassensor mit einem in den Sensoraufbau integrierten Heizelement

Publications (1)

Publication Number Publication Date
JPS5717849A true JPS5717849A (en) 1982-01-29

Family

ID=6102965

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7560881A Pending JPS5717849A (en) 1980-05-21 1981-05-19 Thin film gas sensor

Country Status (4)

Country Link
US (1) US4338281A (Direct)
JP (1) JPS5717849A (Direct)
DE (1) DE3019387C2 (Direct)
FR (1) FR2484646A1 (Direct)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59143945A (ja) * 1983-02-07 1984-08-17 Richo Seiki Kk ガス検出装置
JPH01118760A (ja) * 1987-10-31 1989-05-11 Toshiba Corp センサの製造方法
JPH01284747A (ja) * 1988-05-10 1989-11-16 Ricoh Co Ltd ガスセンサ
JPH0219756A (ja) * 1988-07-06 1990-01-23 Ricoh Co Ltd ガス検出装置

Families Citing this family (47)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5766347A (en) * 1980-10-09 1982-04-22 Hitachi Ltd Detector for mixture gas
JPS57178147A (en) * 1981-04-27 1982-11-02 Nippon Soken Inc Detector for gaseous component
JPS57194345A (en) * 1981-05-25 1982-11-29 Nippon Soken Inc Gas component detector
JPS57200844A (en) * 1981-06-04 1982-12-09 Ngk Insulators Ltd Oxygen concentration detector
US4387165A (en) * 1982-04-22 1983-06-07 Youngblood James L H2 S Detector having semiconductor and noncontinuous inert film deposited thereon
DE3217883A1 (de) * 1982-05-12 1983-11-17 Siemens AG, 1000 Berlin und 8000 München Gassensor
US4453151A (en) * 1982-06-07 1984-06-05 Leary David J Semiconductor gas sensor
US4601914A (en) * 1982-06-07 1986-07-22 Airtech, Inc. Method for fabricating a semiconductor gas sensor
JPS5927253A (ja) * 1982-08-06 1984-02-13 Shinei Kk ガスセンサおよびその製造法
US4442420A (en) * 1982-09-30 1984-04-10 Ford Motor Company Partial pressure of oxygen sensor-II
JPS59188549A (ja) * 1983-04-11 1984-10-25 Shinkosumosu Denki Kk ２端子形半導体ガス検知素子
US4916935A (en) * 1983-11-09 1990-04-17 Bacharach, Inc. Low power solid state gas sensor with linear output and method of making the same
US4541988A (en) * 1983-12-13 1985-09-17 Bacharach Instrument Company Constant temperature catalytic gas detection instrument
US4587105A (en) * 1984-05-17 1986-05-06 Honeywell Inc. Integratable oxygen sensor
EP0265834B1 (en) * 1986-10-28 1992-07-22 Figaro Engineering Inc. Sensor and method of producing same
US5128514A (en) * 1987-07-31 1992-07-07 Siemens Aktiengesellschaft Black radiator for use as an emitter in calibratable gas sensors
DE3818052A1 (de) * 1988-05-27 1989-12-07 Geraetebau Gmbh Atemschutzmaske
FI82774C (fi) * 1988-06-08 1991-04-10 Vaisala Oy Integrerad uppvaermbar sensor.
US4953387A (en) * 1989-07-31 1990-09-04 The Regents Of The University Of Michigan Ultrathin-film gas detector
WO1991006001A1 (de) * 1989-10-17 1991-05-02 E.T.R. Elektronik Technologie Rump Gmbh Gas-sensor-anordnung
DE4105025C1 (Direct) * 1991-02-19 1992-07-02 Robert Bosch Gmbh, 7000 Stuttgart, De
US5994144A (en) * 1992-03-04 1999-11-30 Fujitsu Limited Simplified environmental atmosphere measuring method
US5382341A (en) * 1992-09-10 1995-01-17 Aroutiounian; Vladimir M. Method of making smoke detector
GB2274336B (en) * 1993-01-13 1997-04-30 British Gas Plc Gas sensors
US5466605A (en) * 1993-03-15 1995-11-14 Arizona Board Of Regents Method for detection of chemical components
FI101911B (fi) * 1993-04-07 1998-09-15 Valtion Teknillinen Sähköisesti moduloitava terminen säteilylähde ja menetelmä sen valmist amiseksi
EP0646791B1 (en) * 1993-09-30 2001-09-05 Nittan Company, Limited Sensor device, and electronic equipment each having sensor device incorporated therein
WO1996019724A1 (en) * 1994-12-22 1996-06-27 Senova Corporation Apparatus for detecting selected chemical components of fluid streams
US5985673A (en) * 1994-12-22 1999-11-16 Arizona Baord Of Regents Method for regeneration of a sensor
DE19547150C2 (de) * 1995-12-16 2000-08-03 Draegerwerk Ag Gassensor
DE19606272C2 (de) * 1996-02-21 2001-05-17 Ust Umweltsensortechnik Gmbh Halbleiter-Gassensor
US6596236B2 (en) * 1999-01-15 2003-07-22 Advanced Technology Materials, Inc. Micro-machined thin film sensor arrays for the detection of H2 containing gases, and method of making and using the same
EP1165187A1 (de) * 1999-03-17 2002-01-02 T.E.M.! Technische Entwicklungen und Management GmbH Sensorvorrichtung und verfahren zur detektion von in luft enthaltenen gasen oder dämpfen
US7080545B2 (en) * 2002-10-17 2006-07-25 Advanced Technology Materials, Inc. Apparatus and process for sensing fluoro species in semiconductor processing systems
US20040163445A1 (en) * 2002-10-17 2004-08-26 Dimeo Frank Apparatus and process for sensing fluoro species in semiconductor processing systems
ITTO20030318A1 (it) * 2003-04-24 2004-10-25 Sacmi Dispositivo sensore di gas a film sottile semiconduttore.
US20060211253A1 (en) * 2005-03-16 2006-09-21 Ing-Shin Chen Method and apparatus for monitoring plasma conditions in an etching plasma processing facility
US7827852B2 (en) * 2007-12-20 2010-11-09 General Electric Company Gas sensor and method of making
EP3096585B1 (de) * 2015-05-18 2017-12-20 E.G.O. ELEKTRO-GERÄTEBAU GmbH Heizeinrichtung zum erhitzen von fluiden und verfahren zum betrieb einer solchen heizeinrichtung
DE102016003283B4 (de) 2016-03-18 2022-05-19 Dräger Safety AG & Co. KGaA Gasmessvorrichtung mit einer Prüfvorrichtung zur Überprüfung eines Gassensors
DE102016003284B4 (de) 2016-03-18 2022-05-19 Dräger Safety AG & Co. KGaA Gasmessvorrichtung mit einer Prüfvorrichtung zur Überprüfung eines Gassensors
US11275051B2 (en) 2016-03-23 2022-03-15 Vaon, Llc Metal oxide-based chemical sensors
US10132769B2 (en) 2016-07-13 2018-11-20 Vaon, Llc Doped, metal oxide-based chemical sensors
US11243192B2 (en) 2016-09-27 2022-02-08 Vaon, Llc 3-D glass printable hand-held gas chromatograph for biomedical and environmental applications
US11203183B2 (en) 2016-09-27 2021-12-21 Vaon, Llc Single and multi-layer, flat glass-sensor structures
WO2018160650A1 (en) 2017-02-28 2018-09-07 Vaon, Llc Bimetal doped-metal oxide-based chemical sensors
EP3715842B1 (en) * 2019-03-26 2021-05-19 Infineon Technologies AG Mems gas sensor

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5473097A (en) * 1977-11-22 1979-06-12 Seiko Epson Corp Gas sensor

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3865550A (en) * 1970-08-26 1975-02-11 Nat Res Dev Semi-conducting gas sensitive devices
US3751968A (en) * 1971-01-22 1973-08-14 Inficon Inc Solid state sensor
US3901067A (en) * 1973-06-21 1975-08-26 Gen Monitors Semiconductor gas detector and method therefor
DE2651160C3 (de) * 1975-11-08 1979-05-31 Matsushita Electric Industrial Co., Ltd., Kadoma, Osaka (Japan) Sensor für reduzierende Gase
US4045178A (en) * 1975-11-08 1977-08-30 Matsushita Electric Industrial Co., Ltd. Reducing gas sensor
GB1557921A (en) * 1977-01-10 1979-12-19 British Steel Corp Gas monitors
US4224280A (en) * 1977-07-18 1980-09-23 Fuji Electric Co., Ltd. Carbon monoxide detecting device
JPS5421397A (en) * 1977-07-18 1979-02-17 Fuji Electric Co Ltd Carbon monoxide detector
DE2735222A1 (de) 1977-08-04 1979-02-15 Siemens Ag Verfahren und vorrichtung zur messung des aethylalkoholgehaltes von luft
DE2737385A1 (de) * 1977-08-19 1979-03-22 Licentia Gmbh Gasspuerelement zum nachweis von fetten und geruchsstoffen in duensten
DE2933971C2 (de) 1979-08-22 1983-12-15 Siemens AG, 1000 Berlin und 8000 München Gassensor hoher Empfindlichkeit und Stabilität zum Nachweis und zur Messung des Verunreinigungsgehaltes von Luft auf der Basis von Metalloxidhalbleitern

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5473097A (en) * 1977-11-22 1979-06-12 Seiko Epson Corp Gas sensor

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59143945A (ja) * 1983-02-07 1984-08-17 Richo Seiki Kk ガス検出装置
JPH01118760A (ja) * 1987-10-31 1989-05-11 Toshiba Corp センサの製造方法
JPH01284747A (ja) * 1988-05-10 1989-11-16 Ricoh Co Ltd ガスセンサ
JPH0219756A (ja) * 1988-07-06 1990-01-23 Ricoh Co Ltd ガス検出装置

Also Published As

Publication number Publication date
US4338281A (en) 1982-07-06
DE3019387C2 (de) 1986-01-23
FR2484646B1 (Direct) 1985-02-08
FR2484646A1 (fr) 1981-12-18
DE3019387A1 (de) 1981-11-26

Similar Documents

Publication Publication Date Title
JPS5717849A (en) Thin film gas sensor
AU540788B2 (en) Thermal sensor
JPS57813A (en) Sensor
AU520484B2 (en) Oxygen sensing device
JPS57132301A (en) Ni-fe thin film temperature sensor
GB2054163B (en) Flat thin film type oxygen sensor
JPS57108734A (en) Sensor
JPS5774648A (en) Selective thin film gas sensor and manufacture thereof
AU549604B2 (en) Gas sensing unit
DE3169023D1 (en) Sensor
JPS57108735A (en) Sensor
GB2093190B (en) Blood gas sensor
GB2085168B (en) Semiconductor gas sensor
GB2075197B (en) Electrochemical gas sensor
JPS57165832A (en) Thin film
DE3169227D1 (en) Gas sensor
JPS57113303A (en) Film thickness measuring device
JPS56147055A (en) Oxygen sensor
GB2075195B (en) Gas sensors
JPS5712505A (en) Thin film thermistor
JPS5712504A (en) Thin film thermistor
JPS5785191A (en) Sensor
JPS575302A (en) Resistance thin film
GB2048505B (en) Inermittent film advance
JPS5785204A (en) Thin film thermistor