JPS57173704A - Highly stable interferometer - Google Patents

Highly stable interferometer

Info

Publication number
JPS57173704A
JPS57173704A JP56058572A JP5857281A JPS57173704A JP S57173704 A JPS57173704 A JP S57173704A JP 56058572 A JP56058572 A JP 56058572A JP 5857281 A JP5857281 A JP 5857281A JP S57173704 A JPS57173704 A JP S57173704A
Authority
JP
Japan
Prior art keywords
light
temperature change
sample
semi
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56058572A
Other languages
Japanese (ja)
Inventor
Mitsuhiro Tatsuta
Sen Shibata
Yoshiyuki Aomi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Publication of JPS57173704A publication Critical patent/JPS57173704A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B1/00—Measuring instruments characterised by the selection of material therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02024—Measuring in transmission, i.e. light traverses the object

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)

Abstract

PURPOSE:To decrease the fluctuation of interence fringes due to temperature change or vibration, in the interferometer including a reference light path and a sample light path, by constituting both light paths by solid mediums whose change in refractive index due to the temperature change is small. CONSTITUTION:The incident luminous flux of a Mach-Zehnder interferometer is divided into the reference light 2 and the sample light 3 by a semitransparent mirror 6-1. The reference light is inputted to a semi-transparent mirror 6-3 through a semi-transparent mirror 6-2 and a reflecting mirror 5 for changing the light path length. The sample light passes a sample 4 and reaches the semi- transparent mirror 6-3. Both light beams are synthesized and enter an interference fringe detector 7. In this way, since the solid mediums 8-1, 8-2, 8-3, and 8-4 whose change in the refractive index due to the temperature change is small are arranged in two light paths, the fluctuation in the interference frings due to the temperature change is decreased in comparison with the propagation in the air. The device also has high vibration resistance. A single mode optical fiber can be used as a solid medium.
JP56058572A 1981-04-20 Highly stable interferometer Pending JPS57173704A (en)

Publications (1)

Publication Number Publication Date
JPS57173704A true JPS57173704A (en) 1982-10-26

Family

ID=1762119

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56058572A Pending JPS57173704A (en) 1981-04-20 Highly stable interferometer

Country Status (1)

Country Link
JP (1) JPS57173704A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6134403A (en) * 1984-07-26 1986-02-18 Nec Corp Optical interferometer
JPS621608U (en) * 1985-06-19 1987-01-08
JPH03255902A (en) * 1990-03-07 1991-11-14 Hitachi Ltd Interference optical system
JPH0628612U (en) * 1983-09-23 1994-04-15 カール−ツアイス−スチフツング Multi-axis measuring instrument
JP2019124547A (en) * 2018-01-16 2019-07-25 浜松ホトニクス株式会社 Interference image acquisition device and interference image acquisition method
US10612906B2 (en) * 2016-06-28 2020-04-07 Lumentum Technology Uk Limited Optical locker using first and second transparent materials for path length independence from temperature

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0628612U (en) * 1983-09-23 1994-04-15 カール−ツアイス−スチフツング Multi-axis measuring instrument
JPS6134403A (en) * 1984-07-26 1986-02-18 Nec Corp Optical interferometer
JPS621608U (en) * 1985-06-19 1987-01-08
JPH03255902A (en) * 1990-03-07 1991-11-14 Hitachi Ltd Interference optical system
US10612906B2 (en) * 2016-06-28 2020-04-07 Lumentum Technology Uk Limited Optical locker using first and second transparent materials for path length independence from temperature
US11215440B2 (en) 2016-06-28 2022-01-04 Lumentum Technology Uk Limited Interferometry assembly for use in an optical locker
US11835337B2 (en) 2016-06-28 2023-12-05 Lumentum Technology Uk Limited Interferometry assembly having optical paths through different materials
JP2019124547A (en) * 2018-01-16 2019-07-25 浜松ホトニクス株式会社 Interference image acquisition device and interference image acquisition method
WO2019142492A1 (en) * 2018-01-16 2019-07-25 浜松ホトニクス株式会社 Interference image acquiring device and method for acquiring interference image
CN111556951A (en) * 2018-01-16 2020-08-18 浜松光子学株式会社 Interference image acquisition device and interference image acquisition method
CN111556951B (en) * 2018-01-16 2022-05-03 浜松光子学株式会社 Interference image acquisition device and interference image acquisition method
US11630059B2 (en) 2018-01-16 2023-04-18 Hamamatsu Photonics K.K. Interference image acquiring device and method for acquiring interference image

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