JPS57169664A - Humidity sensitive element - Google Patents

Humidity sensitive element

Info

Publication number
JPS57169664A
JPS57169664A JP56056170A JP5617081A JPS57169664A JP S57169664 A JPS57169664 A JP S57169664A JP 56056170 A JP56056170 A JP 56056170A JP 5617081 A JP5617081 A JP 5617081A JP S57169664 A JPS57169664 A JP S57169664A
Authority
JP
Japan
Prior art keywords
oxide
sensitive element
mixture
humidity sensitive
surface roughness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56056170A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6161627B2 (enrdf_load_stackoverflow
Inventor
Keiji Yuki
Naoe Watabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JAPAN ELECTRONIC IND DEV ASSOC<JEIDA>
Marcon Electronics Co Ltd
Original Assignee
JAPAN ELECTRONIC IND DEV ASSOC<JEIDA>
Marcon Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by JAPAN ELECTRONIC IND DEV ASSOC<JEIDA>, Marcon Electronics Co Ltd filed Critical JAPAN ELECTRONIC IND DEV ASSOC<JEIDA>
Priority to JP56056170A priority Critical patent/JPS57169664A/ja
Publication of JPS57169664A publication Critical patent/JPS57169664A/ja
Publication of JPS6161627B2 publication Critical patent/JPS6161627B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Non-Adjustable Resistors (AREA)
JP56056170A 1981-04-13 1981-04-13 Humidity sensitive element Granted JPS57169664A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56056170A JPS57169664A (en) 1981-04-13 1981-04-13 Humidity sensitive element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56056170A JPS57169664A (en) 1981-04-13 1981-04-13 Humidity sensitive element

Publications (2)

Publication Number Publication Date
JPS57169664A true JPS57169664A (en) 1982-10-19
JPS6161627B2 JPS6161627B2 (enrdf_load_stackoverflow) 1986-12-26

Family

ID=13019618

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56056170A Granted JPS57169664A (en) 1981-04-13 1981-04-13 Humidity sensitive element

Country Status (1)

Country Link
JP (1) JPS57169664A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6076101A (ja) * 1983-10-03 1985-04-30 日本セメント株式会社 感湿素子の製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54156690A (en) * 1978-05-31 1979-12-10 Matsushita Electric Ind Co Ltd Humidity sensing element

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54156690A (en) * 1978-05-31 1979-12-10 Matsushita Electric Ind Co Ltd Humidity sensing element

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6076101A (ja) * 1983-10-03 1985-04-30 日本セメント株式会社 感湿素子の製造方法

Also Published As

Publication number Publication date
JPS6161627B2 (enrdf_load_stackoverflow) 1986-12-26

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