JPS57168841A - Vacuum controller of vacuum chuck - Google Patents

Vacuum controller of vacuum chuck

Info

Publication number
JPS57168841A
JPS57168841A JP4937781A JP4937781A JPS57168841A JP S57168841 A JPS57168841 A JP S57168841A JP 4937781 A JP4937781 A JP 4937781A JP 4937781 A JP4937781 A JP 4937781A JP S57168841 A JPS57168841 A JP S57168841A
Authority
JP
Japan
Prior art keywords
vacuum chuck
vacuum
machined work
flow
solenoid valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4937781A
Other languages
Japanese (ja)
Inventor
Takashi Sano
Hisamoto Watanabe
Tsuneo Uchiyama
Atsushi Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Via Mechanics Ltd
Original Assignee
Hitachi Seiko Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Seiko Ltd filed Critical Hitachi Seiko Ltd
Priority to JP4937781A priority Critical patent/JPS57168841A/en
Publication of JPS57168841A publication Critical patent/JPS57168841A/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
    • B25B11/005—Vacuum work holders

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Jigs For Machine Tools (AREA)

Abstract

PURPOSE:To suck a machined work even if chucks are not fully closed, by providing respective flow detector and air pressure open-close valve in a vacuum suction pipe line of each vacuum chuck and closing the air pressure open-close valve when a flow increases to exceed a normal range. CONSTITUTION:A machined work 2a is placed on a vacuum chuck 4a, then suction power of a vacuum pump 7 is communicated to the vacuum chuck, through a branch pipe 9a, flow detector 10a and solenoid valve 11a in an open state, to suck and hold the machined work 2a. If the machined work 2a is sucked by the vacuum chuck 4a, many fine through holes, vertically drilled in the vacuum chuck 4a, are closed by the machined work 2a, and a flow of air in the branch pipe 9a is decreased almost to zero, then an excessive flow signal is not generated by the flow detector 10a, thus the solenoid valve 11a is kept in a normally open state. When the machined work is not placed on the vacuum chuck 4a, the flow detector 10a generates the excessive flow signal to close the solenoid valve 11a.
JP4937781A 1981-04-03 1981-04-03 Vacuum controller of vacuum chuck Pending JPS57168841A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4937781A JPS57168841A (en) 1981-04-03 1981-04-03 Vacuum controller of vacuum chuck

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4937781A JPS57168841A (en) 1981-04-03 1981-04-03 Vacuum controller of vacuum chuck

Publications (1)

Publication Number Publication Date
JPS57168841A true JPS57168841A (en) 1982-10-18

Family

ID=12829327

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4937781A Pending JPS57168841A (en) 1981-04-03 1981-04-03 Vacuum controller of vacuum chuck

Country Status (1)

Country Link
JP (1) JPS57168841A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02131831A (en) * 1988-09-27 1990-05-21 W R Grace & Co Work holder
CN100391696C (en) * 2005-09-15 2008-06-04 江南大学 Self adaptive vacuum suction disc work bench
CN105171480A (en) * 2015-09-16 2015-12-23 竹昌精密冲压件(上海)有限公司 Vacuum detection device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02131831A (en) * 1988-09-27 1990-05-21 W R Grace & Co Work holder
CN100391696C (en) * 2005-09-15 2008-06-04 江南大学 Self adaptive vacuum suction disc work bench
CN105171480A (en) * 2015-09-16 2015-12-23 竹昌精密冲压件(上海)有限公司 Vacuum detection device

Similar Documents

Publication Publication Date Title
AU559604B2 (en) Control valve
DE59506893D1 (en) Vacuum pumping station
YU258579A (en) Blocking valve
MY100250A (en) Pneumatic amplifier with negative feedback for current to pressure transducer
CA2148235A1 (en) Vacuum Toilet Discharge Valve
TW200510979A (en) Proportional pressure regulator having positive and negative pressure delivery capability
JPS57168841A (en) Vacuum controller of vacuum chuck
EP0343909A3 (en) Fluid fittings
AU2496192A (en) A fluid discharge valve
AU639230B2 (en) Apparatus and method for opening drains
JPS6452571A (en) Pressure fluid control system
JPH0631671A (en) Vacuum sucker and air ejector control valve for vacuum sucker
IE893169L (en) Fibre blowing brake
JPS645755A (en) Seating sensor device
CN221560577U (en) Gas circuit circulation adsorption device
JPS5856744A (en) Chuck
JPS57138546A (en) Electric spark machining device
JPS5776373A (en) Valve device
JPS6489513A (en) Method of checking leakage in vapor growth device
GB1097684A (en) Screw operated fluid flow control valves
JP2550746Y2 (en) One stage pressure reducing section of multi-stage pressure reducing valve
JPS5740182A (en) Pilot actuating solenoid valve
JPS57121408A (en) Spindle device
JPS6443429A (en) Exposure method
JPS57144432A (en) Leakage detector for sodium