JPS57167648A - Processing and inspecting device for electronic part - Google Patents

Processing and inspecting device for electronic part

Info

Publication number
JPS57167648A
JPS57167648A JP56045094A JP4509481A JPS57167648A JP S57167648 A JPS57167648 A JP S57167648A JP 56045094 A JP56045094 A JP 56045094A JP 4509481 A JP4509481 A JP 4509481A JP S57167648 A JPS57167648 A JP S57167648A
Authority
JP
Japan
Prior art keywords
inspected
detection
tracking
reflections
marker
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56045094A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6348178B2 (enExample
Inventor
Masahito Nakajima
Tetsuo Hizuka
Masato Miyamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP56045094A priority Critical patent/JPS57167648A/ja
Publication of JPS57167648A publication Critical patent/JPS57167648A/ja
Publication of JPS6348178B2 publication Critical patent/JPS6348178B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P74/00—
    • H10W72/0711—
    • H10W72/07141—
    • H10W72/07168—
    • H10W72/07502—

Landscapes

  • Wire Bonding (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP56045094A 1981-03-27 1981-03-27 Processing and inspecting device for electronic part Granted JPS57167648A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56045094A JPS57167648A (en) 1981-03-27 1981-03-27 Processing and inspecting device for electronic part

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56045094A JPS57167648A (en) 1981-03-27 1981-03-27 Processing and inspecting device for electronic part

Publications (2)

Publication Number Publication Date
JPS57167648A true JPS57167648A (en) 1982-10-15
JPS6348178B2 JPS6348178B2 (enExample) 1988-09-28

Family

ID=12709714

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56045094A Granted JPS57167648A (en) 1981-03-27 1981-03-27 Processing and inspecting device for electronic part

Country Status (1)

Country Link
JP (1) JPS57167648A (enExample)

Also Published As

Publication number Publication date
JPS6348178B2 (enExample) 1988-09-28

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