JPS6484555A - Sample image indicator - Google Patents

Sample image indicator

Info

Publication number
JPS6484555A
JPS6484555A JP62242296A JP24229687A JPS6484555A JP S6484555 A JPS6484555 A JP S6484555A JP 62242296 A JP62242296 A JP 62242296A JP 24229687 A JP24229687 A JP 24229687A JP S6484555 A JPS6484555 A JP S6484555A
Authority
JP
Japan
Prior art keywords
stage
chip
wafer
controller
coordinate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62242296A
Other languages
Japanese (ja)
Other versions
JP2611260B2 (en
Inventor
Yutaka Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP62242296A priority Critical patent/JP2611260B2/en
Publication of JPS6484555A publication Critical patent/JPS6484555A/en
Application granted granted Critical
Publication of JP2611260B2 publication Critical patent/JP2611260B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PURPOSE:To make it possible to check the position that are being observed now on a wafer instantaneously by reading which part the display is showing on a sample from the position of a stage so as to indicate the pattern of a position on the sample. CONSTITUTION:Chip layout information on a wafer to be observed is input in advance to a controller 18, and next the wafer is transferred onto a stage 10 and then the origin of the wafer and the origin coordinate of the stage are accorded. Thereafter, when the stage 10 is shifted by operating a stage shift indicator 17, a position sensor inside a stage driving device 16 sends its coordinate to the controller 18. The controller 18 indicates, along with a sample image, a chip layout figure 22 and a chip magnified figure 23 on a CRT display 15 based on the chip layout information inputted in advance. At the same time, the chip in observing and the observing position in the chip are deduced by calculating the position coordinate of the stage and the chip layout information and a mark M is displayed at that section.
JP62242296A 1987-09-26 1987-09-26 Sample image display Expired - Fee Related JP2611260B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62242296A JP2611260B2 (en) 1987-09-26 1987-09-26 Sample image display

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62242296A JP2611260B2 (en) 1987-09-26 1987-09-26 Sample image display

Publications (2)

Publication Number Publication Date
JPS6484555A true JPS6484555A (en) 1989-03-29
JP2611260B2 JP2611260B2 (en) 1997-05-21

Family

ID=17087126

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62242296A Expired - Fee Related JP2611260B2 (en) 1987-09-26 1987-09-26 Sample image display

Country Status (1)

Country Link
JP (1) JP2611260B2 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996031897A1 (en) * 1995-04-07 1996-10-10 Hitachi, Ltd. Electron microscope
JPH10172490A (en) * 1996-12-10 1998-06-26 Hitachi Ltd Scan electron microscope
US6388747B2 (en) 1998-11-30 2002-05-14 Hitachi, Ltd. Inspection method, apparatus and system for circuit pattern
JP2003303566A (en) * 2002-04-11 2003-10-24 Keyence Corp Electron microscope, operating method of electron microscope, electron microscope operation program, and computer-readable recording medium
JP2004063468A (en) * 2003-08-11 2004-02-26 Hitachi Ltd Scanning electron microscope
US7214937B2 (en) 2000-08-25 2007-05-08 Hitachi, Ltd. Electron microscope

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59138162U (en) * 1983-03-08 1984-09-14 日本電子株式会社 scanning electron microscope
JPS62195840A (en) * 1986-02-21 1987-08-28 Jeol Ltd Scanning electron microscope

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59138162U (en) * 1983-03-08 1984-09-14 日本電子株式会社 scanning electron microscope
JPS62195840A (en) * 1986-02-21 1987-08-28 Jeol Ltd Scanning electron microscope

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996031897A1 (en) * 1995-04-07 1996-10-10 Hitachi, Ltd. Electron microscope
JPH10172490A (en) * 1996-12-10 1998-06-26 Hitachi Ltd Scan electron microscope
US6493082B2 (en) * 1998-11-30 2002-12-10 Hitachi, Ltd. Inspection method, apparatus and system for circuit pattern
US6421122B2 (en) 1998-11-30 2002-07-16 Hitachi, Ltd. Inspection method, apparatus and system for circuit pattern
US6476913B1 (en) 1998-11-30 2002-11-05 Hitachi, Ltd. Inspection method, apparatus and system for circuit pattern
US6480279B2 (en) 1998-11-30 2002-11-12 Hitachi, Ltd. Inspection method, apparatus and system for circuit pattern
US6388747B2 (en) 1998-11-30 2002-05-14 Hitachi, Ltd. Inspection method, apparatus and system for circuit pattern
US6504609B2 (en) 1998-11-30 2003-01-07 Hitachi, Ltd. Inspection method, apparatus and system for circuit pattern
US6567168B2 (en) 1998-11-30 2003-05-20 Hitachi, Ltd. Inspection method, apparatus and system for circuit pattern
US6759655B2 (en) 1998-11-30 2004-07-06 Hitachi, Ltd. Inspection method, apparatus and system for circuit pattern
US6903821B2 (en) * 1998-11-30 2005-06-07 Hitachi, Ltd. Inspection method, apparatus and system for circuit pattern
US7214937B2 (en) 2000-08-25 2007-05-08 Hitachi, Ltd. Electron microscope
JP2003303566A (en) * 2002-04-11 2003-10-24 Keyence Corp Electron microscope, operating method of electron microscope, electron microscope operation program, and computer-readable recording medium
JP2004063468A (en) * 2003-08-11 2004-02-26 Hitachi Ltd Scanning electron microscope

Also Published As

Publication number Publication date
JP2611260B2 (en) 1997-05-21

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees