JPS6484555A - Sample image indicator - Google Patents
Sample image indicatorInfo
- Publication number
- JPS6484555A JPS6484555A JP62242296A JP24229687A JPS6484555A JP S6484555 A JPS6484555 A JP S6484555A JP 62242296 A JP62242296 A JP 62242296A JP 24229687 A JP24229687 A JP 24229687A JP S6484555 A JPS6484555 A JP S6484555A
- Authority
- JP
- Japan
- Prior art keywords
- stage
- chip
- wafer
- controller
- coordinate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE:To make it possible to check the position that are being observed now on a wafer instantaneously by reading which part the display is showing on a sample from the position of a stage so as to indicate the pattern of a position on the sample. CONSTITUTION:Chip layout information on a wafer to be observed is input in advance to a controller 18, and next the wafer is transferred onto a stage 10 and then the origin of the wafer and the origin coordinate of the stage are accorded. Thereafter, when the stage 10 is shifted by operating a stage shift indicator 17, a position sensor inside a stage driving device 16 sends its coordinate to the controller 18. The controller 18 indicates, along with a sample image, a chip layout figure 22 and a chip magnified figure 23 on a CRT display 15 based on the chip layout information inputted in advance. At the same time, the chip in observing and the observing position in the chip are deduced by calculating the position coordinate of the stage and the chip layout information and a mark M is displayed at that section.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62242296A JP2611260B2 (en) | 1987-09-26 | 1987-09-26 | Sample image display |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62242296A JP2611260B2 (en) | 1987-09-26 | 1987-09-26 | Sample image display |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6484555A true JPS6484555A (en) | 1989-03-29 |
JP2611260B2 JP2611260B2 (en) | 1997-05-21 |
Family
ID=17087126
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62242296A Expired - Fee Related JP2611260B2 (en) | 1987-09-26 | 1987-09-26 | Sample image display |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2611260B2 (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1996031897A1 (en) * | 1995-04-07 | 1996-10-10 | Hitachi, Ltd. | Electron microscope |
JPH10172490A (en) * | 1996-12-10 | 1998-06-26 | Hitachi Ltd | Scan electron microscope |
US6388747B2 (en) | 1998-11-30 | 2002-05-14 | Hitachi, Ltd. | Inspection method, apparatus and system for circuit pattern |
JP2003303566A (en) * | 2002-04-11 | 2003-10-24 | Keyence Corp | Electron microscope, operating method of electron microscope, electron microscope operation program, and computer-readable recording medium |
JP2004063468A (en) * | 2003-08-11 | 2004-02-26 | Hitachi Ltd | Scanning electron microscope |
US7214937B2 (en) | 2000-08-25 | 2007-05-08 | Hitachi, Ltd. | Electron microscope |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59138162U (en) * | 1983-03-08 | 1984-09-14 | 日本電子株式会社 | scanning electron microscope |
JPS62195840A (en) * | 1986-02-21 | 1987-08-28 | Jeol Ltd | Scanning electron microscope |
-
1987
- 1987-09-26 JP JP62242296A patent/JP2611260B2/en not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59138162U (en) * | 1983-03-08 | 1984-09-14 | 日本電子株式会社 | scanning electron microscope |
JPS62195840A (en) * | 1986-02-21 | 1987-08-28 | Jeol Ltd | Scanning electron microscope |
Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1996031897A1 (en) * | 1995-04-07 | 1996-10-10 | Hitachi, Ltd. | Electron microscope |
JPH10172490A (en) * | 1996-12-10 | 1998-06-26 | Hitachi Ltd | Scan electron microscope |
US6493082B2 (en) * | 1998-11-30 | 2002-12-10 | Hitachi, Ltd. | Inspection method, apparatus and system for circuit pattern |
US6421122B2 (en) | 1998-11-30 | 2002-07-16 | Hitachi, Ltd. | Inspection method, apparatus and system for circuit pattern |
US6476913B1 (en) | 1998-11-30 | 2002-11-05 | Hitachi, Ltd. | Inspection method, apparatus and system for circuit pattern |
US6480279B2 (en) | 1998-11-30 | 2002-11-12 | Hitachi, Ltd. | Inspection method, apparatus and system for circuit pattern |
US6388747B2 (en) | 1998-11-30 | 2002-05-14 | Hitachi, Ltd. | Inspection method, apparatus and system for circuit pattern |
US6504609B2 (en) | 1998-11-30 | 2003-01-07 | Hitachi, Ltd. | Inspection method, apparatus and system for circuit pattern |
US6567168B2 (en) | 1998-11-30 | 2003-05-20 | Hitachi, Ltd. | Inspection method, apparatus and system for circuit pattern |
US6759655B2 (en) | 1998-11-30 | 2004-07-06 | Hitachi, Ltd. | Inspection method, apparatus and system for circuit pattern |
US6903821B2 (en) * | 1998-11-30 | 2005-06-07 | Hitachi, Ltd. | Inspection method, apparatus and system for circuit pattern |
US7214937B2 (en) | 2000-08-25 | 2007-05-08 | Hitachi, Ltd. | Electron microscope |
JP2003303566A (en) * | 2002-04-11 | 2003-10-24 | Keyence Corp | Electron microscope, operating method of electron microscope, electron microscope operation program, and computer-readable recording medium |
JP2004063468A (en) * | 2003-08-11 | 2004-02-26 | Hitachi Ltd | Scanning electron microscope |
Also Published As
Publication number | Publication date |
---|---|
JP2611260B2 (en) | 1997-05-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |