JPS57163876A - Measuring method for latch-up dielectric strength of complementary mos integrated-circuit device - Google Patents

Measuring method for latch-up dielectric strength of complementary mos integrated-circuit device

Info

Publication number
JPS57163876A
JPS57163876A JP56049544A JP4954481A JPS57163876A JP S57163876 A JPS57163876 A JP S57163876A JP 56049544 A JP56049544 A JP 56049544A JP 4954481 A JP4954481 A JP 4954481A JP S57163876 A JPS57163876 A JP S57163876A
Authority
JP
Japan
Prior art keywords
latch
capacitor
dielectric strength
voltage
measured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56049544A
Other languages
English (en)
Other versions
JPH0147751B2 (ja
Inventor
Tsutomu Hata
Taiji Nishiuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP56049544A priority Critical patent/JPS57163876A/ja
Publication of JPS57163876A publication Critical patent/JPS57163876A/ja
Publication of JPH0147751B2 publication Critical patent/JPH0147751B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP56049544A 1981-03-31 1981-03-31 Measuring method for latch-up dielectric strength of complementary mos integrated-circuit device Granted JPS57163876A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56049544A JPS57163876A (en) 1981-03-31 1981-03-31 Measuring method for latch-up dielectric strength of complementary mos integrated-circuit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56049544A JPS57163876A (en) 1981-03-31 1981-03-31 Measuring method for latch-up dielectric strength of complementary mos integrated-circuit device

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP63196741A Division JPH01180472A (ja) 1988-08-05 1988-08-05 半導体集積回路装置のラッチアップ耐量の測定方法及び測定装置

Publications (2)

Publication Number Publication Date
JPS57163876A true JPS57163876A (en) 1982-10-08
JPH0147751B2 JPH0147751B2 (ja) 1989-10-16

Family

ID=12834128

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56049544A Granted JPS57163876A (en) 1981-03-31 1981-03-31 Measuring method for latch-up dielectric strength of complementary mos integrated-circuit device

Country Status (1)

Country Link
JP (1) JPS57163876A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6144370A (ja) * 1984-08-07 1986-03-04 Mitsubishi Electric Corp 静電気破壊試験方法
JPS61256266A (ja) * 1985-05-09 1986-11-13 Rohm Co Ltd Ｃｍｏｓ素子のラツチアツプ現象測定方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5644866A (en) * 1979-09-21 1981-04-24 Hitachi Ltd Measurement of breakdown strength of latch circuit

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5644866A (en) * 1979-09-21 1981-04-24 Hitachi Ltd Measurement of breakdown strength of latch circuit

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6144370A (ja) * 1984-08-07 1986-03-04 Mitsubishi Electric Corp 静電気破壊試験方法
JPS61256266A (ja) * 1985-05-09 1986-11-13 Rohm Co Ltd Ｃｍｏｓ素子のラツチアツプ現象測定方法

Also Published As

Publication number Publication date
JPH0147751B2 (ja) 1989-10-16

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