JPS57160955U - - Google Patents
Info
- Publication number
- JPS57160955U JPS57160955U JP4847781U JP4847781U JPS57160955U JP S57160955 U JPS57160955 U JP S57160955U JP 4847781 U JP4847781 U JP 4847781U JP 4847781 U JP4847781 U JP 4847781U JP S57160955 U JPS57160955 U JP S57160955U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4847781U JPS6115238Y2 (de) | 1981-04-06 | 1981-04-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4847781U JPS6115238Y2 (de) | 1981-04-06 | 1981-04-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57160955U true JPS57160955U (de) | 1982-10-08 |
| JPS6115238Y2 JPS6115238Y2 (de) | 1986-05-12 |
Family
ID=29845210
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4847781U Expired JPS6115238Y2 (de) | 1981-04-06 | 1981-04-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6115238Y2 (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4651252B2 (ja) * | 1999-07-21 | 2011-03-16 | アイメック | 基板を処理するための装置 |
-
1981
- 1981-04-06 JP JP4847781U patent/JPS6115238Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4651252B2 (ja) * | 1999-07-21 | 2011-03-16 | アイメック | 基板を処理するための装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6115238Y2 (de) | 1986-05-12 |