JPS57160141A - Device for inspecting semiconductor substrate - Google Patents
Device for inspecting semiconductor substrateInfo
- Publication number
- JPS57160141A JPS57160141A JP4527481A JP4527481A JPS57160141A JP S57160141 A JPS57160141 A JP S57160141A JP 4527481 A JP4527481 A JP 4527481A JP 4527481 A JP4527481 A JP 4527481A JP S57160141 A JPS57160141 A JP S57160141A
- Authority
- JP
- Japan
- Prior art keywords
- pump
- inspection bed
- single pipe
- semiconductor substrate
- slow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE:To make it possible to rapidly cool a semiconductor substrate without imparting any abrupt external force to an inspection bed, by using a pump having a slow start and slow down characteristics as the pump for circulating a refrigerant through the inspection bed. CONSTITUTION:A liquid refrigerant is fed as indicated by an arrow A into a single pipe 4 directly connected to an inspection bed 2. As a result, the refrigerant is circulated through the inspection bed 2 and is forced out through another single pipe 5. The feed of the liquid refrigerant is performed by a pump having a slow start and slow down characteristics. If a pump having a quick start and quick stop characteristics is used, a drastic pressure drop is caused between the single pipe 4 and single pipe 5 and the inspection bed 2 is distorted due to the pressure difference. The distortion is transferred to the semiconductor substrate to vary the electric characteristics of the substrate. These problems are obviated by the use of the pump having slow start and slow down characteristics.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4527481A JPS57160141A (en) | 1981-03-27 | 1981-03-27 | Device for inspecting semiconductor substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4527481A JPS57160141A (en) | 1981-03-27 | 1981-03-27 | Device for inspecting semiconductor substrate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57160141A true JPS57160141A (en) | 1982-10-02 |
Family
ID=12714727
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4527481A Pending JPS57160141A (en) | 1981-03-27 | 1981-03-27 | Device for inspecting semiconductor substrate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57160141A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5991734U (en) * | 1982-12-13 | 1984-06-21 | 島田理化工業株式会社 | Sample loading section for cryostat |
| JPS61131834U (en) * | 1985-02-06 | 1986-08-18 | ||
| JPS6371799A (en) * | 1986-09-13 | 1988-04-01 | 松下電工株式会社 | Crime prevention alarm |
| JPH02197142A (en) * | 1988-10-28 | 1990-08-03 | Tokyo Electron Ltd | Sample placing body |
-
1981
- 1981-03-27 JP JP4527481A patent/JPS57160141A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5991734U (en) * | 1982-12-13 | 1984-06-21 | 島田理化工業株式会社 | Sample loading section for cryostat |
| JPS61131834U (en) * | 1985-02-06 | 1986-08-18 | ||
| JPS6371799A (en) * | 1986-09-13 | 1988-04-01 | 松下電工株式会社 | Crime prevention alarm |
| JPH02197142A (en) * | 1988-10-28 | 1990-08-03 | Tokyo Electron Ltd | Sample placing body |
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