JPS57159042A - Semiconductor device and manufacture thereof - Google Patents

Semiconductor device and manufacture thereof

Info

Publication number
JPS57159042A
JPS57159042A JP4316581A JP4316581A JPS57159042A JP S57159042 A JPS57159042 A JP S57159042A JP 4316581 A JP4316581 A JP 4316581A JP 4316581 A JP4316581 A JP 4316581A JP S57159042 A JPS57159042 A JP S57159042A
Authority
JP
Japan
Prior art keywords
oxygen
film
case
accumulated
ion implantation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4316581A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6258544B2 (cg-RX-API-DMAC7.html
Inventor
Shinichi Ofuji
Chisato Hashimoto
Takao Amasawa
Junichi Murota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP4316581A priority Critical patent/JPS57159042A/ja
Publication of JPS57159042A publication Critical patent/JPS57159042A/ja
Publication of JPS6258544B2 publication Critical patent/JPS6258544B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP4316581A 1981-03-26 1981-03-26 Semiconductor device and manufacture thereof Granted JPS57159042A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4316581A JPS57159042A (en) 1981-03-26 1981-03-26 Semiconductor device and manufacture thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4316581A JPS57159042A (en) 1981-03-26 1981-03-26 Semiconductor device and manufacture thereof

Publications (2)

Publication Number Publication Date
JPS57159042A true JPS57159042A (en) 1982-10-01
JPS6258544B2 JPS6258544B2 (cg-RX-API-DMAC7.html) 1987-12-07

Family

ID=12656256

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4316581A Granted JPS57159042A (en) 1981-03-26 1981-03-26 Semiconductor device and manufacture thereof

Country Status (1)

Country Link
JP (1) JPS57159042A (cg-RX-API-DMAC7.html)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60147136A (ja) * 1984-01-11 1985-08-03 Hitachi Ltd 半導体装置用電極・配線
JPS61150236A (ja) * 1984-12-24 1986-07-08 Hitachi Ltd 半導体装置
JP2004527715A (ja) * 2001-06-04 2004-09-09 フレニ・ブレンボ エス・ピー・エー ブレーキピストン
JP2020047702A (ja) * 2018-09-18 2020-03-26 キオクシア株式会社 半導体装置およびその製造方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60147136A (ja) * 1984-01-11 1985-08-03 Hitachi Ltd 半導体装置用電極・配線
JPS61150236A (ja) * 1984-12-24 1986-07-08 Hitachi Ltd 半導体装置
JP2004527715A (ja) * 2001-06-04 2004-09-09 フレニ・ブレンボ エス・ピー・エー ブレーキピストン
JP2020047702A (ja) * 2018-09-18 2020-03-26 キオクシア株式会社 半導体装置およびその製造方法

Also Published As

Publication number Publication date
JPS6258544B2 (cg-RX-API-DMAC7.html) 1987-12-07

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