JPS57157214A - Production method and device for liquid crystal display substrate - Google Patents

Production method and device for liquid crystal display substrate

Info

Publication number
JPS57157214A
JPS57157214A JP4266181A JP4266181A JPS57157214A JP S57157214 A JPS57157214 A JP S57157214A JP 4266181 A JP4266181 A JP 4266181A JP 4266181 A JP4266181 A JP 4266181A JP S57157214 A JPS57157214 A JP S57157214A
Authority
JP
Japan
Prior art keywords
ion beam
incidence
target material
vacuum tank
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4266181A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0151814B2 (enrdf_load_stackoverflow
Inventor
Koichi Tamura
Kunihiko Hara
Hiromochi Muramatsu
Hironari Kuno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
NipponDenso Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NipponDenso Co Ltd filed Critical NipponDenso Co Ltd
Priority to JP4266181A priority Critical patent/JPS57157214A/ja
Publication of JPS57157214A publication Critical patent/JPS57157214A/ja
Publication of JPH0151814B2 publication Critical patent/JPH0151814B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/133734—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by obliquely evaporated films, e.g. Si or SiO2 films

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Liquid Crystal (AREA)
  • Physical Vapour Deposition (AREA)
JP4266181A 1981-03-24 1981-03-24 Production method and device for liquid crystal display substrate Granted JPS57157214A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4266181A JPS57157214A (en) 1981-03-24 1981-03-24 Production method and device for liquid crystal display substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4266181A JPS57157214A (en) 1981-03-24 1981-03-24 Production method and device for liquid crystal display substrate

Publications (2)

Publication Number Publication Date
JPS57157214A true JPS57157214A (en) 1982-09-28
JPH0151814B2 JPH0151814B2 (enrdf_load_stackoverflow) 1989-11-06

Family

ID=12642190

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4266181A Granted JPS57157214A (en) 1981-03-24 1981-03-24 Production method and device for liquid crystal display substrate

Country Status (1)

Country Link
JP (1) JPS57157214A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61267027A (ja) * 1985-05-21 1986-11-26 Ulvac Corp 液晶配向膜の形成方法
JPS61267026A (ja) * 1985-05-21 1986-11-26 Ulvac Corp 液晶配向膜の形成方法
US4857137A (en) * 1986-01-31 1989-08-15 Hitachi, Ltd. Process for surface treatment
JP2006227430A (ja) * 2005-02-18 2006-08-31 Seiko Epson Corp 無機配向膜形成装置、無機配向膜の形成方法、無機配向膜、電子デバイス用基板、液晶パネルおよび電子機器
US7675603B2 (en) 2005-03-28 2010-03-09 Seiko Epson Corporation Seal structure, seal method, liquid crystal device, manufacturing method thereof, and projector

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61267027A (ja) * 1985-05-21 1986-11-26 Ulvac Corp 液晶配向膜の形成方法
JPS61267026A (ja) * 1985-05-21 1986-11-26 Ulvac Corp 液晶配向膜の形成方法
US4857137A (en) * 1986-01-31 1989-08-15 Hitachi, Ltd. Process for surface treatment
JP2006227430A (ja) * 2005-02-18 2006-08-31 Seiko Epson Corp 無機配向膜形成装置、無機配向膜の形成方法、無機配向膜、電子デバイス用基板、液晶パネルおよび電子機器
US7675603B2 (en) 2005-03-28 2010-03-09 Seiko Epson Corporation Seal structure, seal method, liquid crystal device, manufacturing method thereof, and projector

Also Published As

Publication number Publication date
JPH0151814B2 (enrdf_load_stackoverflow) 1989-11-06

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