JPS57156030A - Production of thin film of metallic oxide - Google Patents

Production of thin film of metallic oxide

Info

Publication number
JPS57156030A
JPS57156030A JP56040963A JP4096381A JPS57156030A JP S57156030 A JPS57156030 A JP S57156030A JP 56040963 A JP56040963 A JP 56040963A JP 4096381 A JP4096381 A JP 4096381A JP S57156030 A JPS57156030 A JP S57156030A
Authority
JP
Japan
Prior art keywords
substrate
thin film
surface layer
metallic
cooling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56040963A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0122810B2 (enExample
Inventor
Kaji Maezawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP56040963A priority Critical patent/JPS57156030A/ja
Publication of JPS57156030A publication Critical patent/JPS57156030A/ja
Publication of JPH0122810B2 publication Critical patent/JPH0122810B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J15/00—Chemical processes in general for reacting gaseous media with non-particulate solids, e.g. sheet material; Apparatus specially adapted therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP56040963A 1981-03-20 1981-03-20 Production of thin film of metallic oxide Granted JPS57156030A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56040963A JPS57156030A (en) 1981-03-20 1981-03-20 Production of thin film of metallic oxide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56040963A JPS57156030A (en) 1981-03-20 1981-03-20 Production of thin film of metallic oxide

Publications (2)

Publication Number Publication Date
JPS57156030A true JPS57156030A (en) 1982-09-27
JPH0122810B2 JPH0122810B2 (enExample) 1989-04-27

Family

ID=12595133

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56040963A Granted JPS57156030A (en) 1981-03-20 1981-03-20 Production of thin film of metallic oxide

Country Status (1)

Country Link
JP (1) JPS57156030A (enExample)

Also Published As

Publication number Publication date
JPH0122810B2 (enExample) 1989-04-27

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