JPS57156030A - Production of thin film of metallic oxide - Google Patents
Production of thin film of metallic oxideInfo
- Publication number
- JPS57156030A JPS57156030A JP4096381A JP4096381A JPS57156030A JP S57156030 A JPS57156030 A JP S57156030A JP 4096381 A JP4096381 A JP 4096381A JP 4096381 A JP4096381 A JP 4096381A JP S57156030 A JPS57156030 A JP S57156030A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- thin film
- surface layer
- metallic
- cooling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title abstract 5
- 229910044991 metal oxide Inorganic materials 0.000 title abstract 2
- 239000000758 substrate Substances 0.000 abstract 6
- 238000001816 cooling Methods 0.000 abstract 3
- 239000002344 surface layer Substances 0.000 abstract 3
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 abstract 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 1
- 238000007664 blowing Methods 0.000 abstract 1
- 229910002091 carbon monoxide Inorganic materials 0.000 abstract 1
- 239000010408 film Substances 0.000 abstract 1
- 239000007789 gas Substances 0.000 abstract 1
- 239000008246 gaseous mixture Substances 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 238000012986 modification Methods 0.000 abstract 1
- 230000004048 modification Effects 0.000 abstract 1
- 229910052760 oxygen Inorganic materials 0.000 abstract 1
- 239000001301 oxygen Substances 0.000 abstract 1
- 229920006254 polymer film Polymers 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
- 238000001771 vacuum deposition Methods 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J15/00—Chemical processes in general for reacting gaseous media with non-particulate solids, e.g. sheet material; Apparatus specially adapted therefor
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4096381A JPS57156030A (en) | 1981-03-20 | 1981-03-20 | Production of thin film of metallic oxide |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4096381A JPS57156030A (en) | 1981-03-20 | 1981-03-20 | Production of thin film of metallic oxide |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57156030A true JPS57156030A (en) | 1982-09-27 |
| JPH0122810B2 JPH0122810B2 (enrdf_load_stackoverflow) | 1989-04-27 |
Family
ID=12595133
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4096381A Granted JPS57156030A (en) | 1981-03-20 | 1981-03-20 | Production of thin film of metallic oxide |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57156030A (enrdf_load_stackoverflow) |
-
1981
- 1981-03-20 JP JP4096381A patent/JPS57156030A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0122810B2 (enrdf_load_stackoverflow) | 1989-04-27 |
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