JPS57154851A - Method for position detection - Google Patents

Method for position detection

Info

Publication number
JPS57154851A
JPS57154851A JP56039538A JP3953881A JPS57154851A JP S57154851 A JPS57154851 A JP S57154851A JP 56039538 A JP56039538 A JP 56039538A JP 3953881 A JP3953881 A JP 3953881A JP S57154851 A JPS57154851 A JP S57154851A
Authority
JP
Japan
Prior art keywords
pad
lead
detected
bit
cameras
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56039538A
Other languages
Japanese (ja)
Inventor
Shuji Takeshita
Nobuhide Okada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP56039538A priority Critical patent/JPS57154851A/en
Publication of JPS57154851A publication Critical patent/JPS57154851A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7088—Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto

Landscapes

  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Supply And Installment Of Electrical Components (AREA)
  • Control Of Position Or Direction (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE:To perform an accurate positioning of parts by a method wherein the bit row generating at every pad and lead is detected by scanning with a TV camera on the pad of a printed substrate and the lead of a part. CONSTITUTION:A printed substrate 10 is placed on a table 9, and the table is driven by a table motor 6 and a ball nut 8. The positions of the pad 11 of the substrate 10 and the lead 13 of the part 12 are detected by the TV cameras 1 and 2. The part supporting rod 18, with which the part 12 will be pinched, is driven by a head motor 3 and a ball nut 4. When the pad 11 and the lead 13 are moved, bit rows are obtained from the image sensors 16 and 17 of the cameras 1 and 2. The position of the part 12 can be detected accurately by computing the results of the comparison between the bit row and the master bit pattern.
JP56039538A 1981-03-20 1981-03-20 Method for position detection Pending JPS57154851A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56039538A JPS57154851A (en) 1981-03-20 1981-03-20 Method for position detection

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56039538A JPS57154851A (en) 1981-03-20 1981-03-20 Method for position detection

Publications (1)

Publication Number Publication Date
JPS57154851A true JPS57154851A (en) 1982-09-24

Family

ID=12555821

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56039538A Pending JPS57154851A (en) 1981-03-20 1981-03-20 Method for position detection

Country Status (1)

Country Link
JP (1) JPS57154851A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62214692A (en) * 1986-03-15 1987-09-21 ティーディーケイ株式会社 Electronic parts mounting apparatus

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4926269A (en) * 1972-07-06 1974-03-08

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4926269A (en) * 1972-07-06 1974-03-08

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62214692A (en) * 1986-03-15 1987-09-21 ティーディーケイ株式会社 Electronic parts mounting apparatus

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