JPS57150843A - Negative type resist material for far ultraviolet ray and formation of resist pattern by this material - Google Patents
Negative type resist material for far ultraviolet ray and formation of resist pattern by this materialInfo
- Publication number
- JPS57150843A JPS57150843A JP56035227A JP3522781A JPS57150843A JP S57150843 A JPS57150843 A JP S57150843A JP 56035227 A JP56035227 A JP 56035227A JP 3522781 A JP3522781 A JP 3522781A JP S57150843 A JPS57150843 A JP S57150843A
- Authority
- JP
- Japan
- Prior art keywords
- negative type
- resist
- resist material
- far
- rays
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56035227A JPS57150843A (en) | 1981-03-13 | 1981-03-13 | Negative type resist material for far ultraviolet ray and formation of resist pattern by this material |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56035227A JPS57150843A (en) | 1981-03-13 | 1981-03-13 | Negative type resist material for far ultraviolet ray and formation of resist pattern by this material |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57150843A true JPS57150843A (en) | 1982-09-17 |
JPS6410058B2 JPS6410058B2 (ja) | 1989-02-21 |
Family
ID=12435946
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56035227A Granted JPS57150843A (en) | 1981-03-13 | 1981-03-13 | Negative type resist material for far ultraviolet ray and formation of resist pattern by this material |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57150843A (ja) |
-
1981
- 1981-03-13 JP JP56035227A patent/JPS57150843A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6410058B2 (ja) | 1989-02-21 |
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