JPS57147856A - Deflecting device of automatic astigmation compensation type - Google Patents

Deflecting device of automatic astigmation compensation type

Info

Publication number
JPS57147856A
JPS57147856A JP56031333A JP3133381A JPS57147856A JP S57147856 A JPS57147856 A JP S57147856A JP 56031333 A JP56031333 A JP 56031333A JP 3133381 A JP3133381 A JP 3133381A JP S57147856 A JPS57147856 A JP S57147856A
Authority
JP
Japan
Prior art keywords
deflection
voltage
focus
current
astigmation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56031333A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6312347B2 (enExample
Inventor
Koichi Kanetani
Norio Baba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP56031333A priority Critical patent/JPS57147856A/ja
Publication of JPS57147856A publication Critical patent/JPS57147856A/ja
Publication of JPS6312347B2 publication Critical patent/JPS6312347B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP56031333A 1981-03-06 1981-03-06 Deflecting device of automatic astigmation compensation type Granted JPS57147856A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56031333A JPS57147856A (en) 1981-03-06 1981-03-06 Deflecting device of automatic astigmation compensation type

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56031333A JPS57147856A (en) 1981-03-06 1981-03-06 Deflecting device of automatic astigmation compensation type

Publications (2)

Publication Number Publication Date
JPS57147856A true JPS57147856A (en) 1982-09-11
JPS6312347B2 JPS6312347B2 (enExample) 1988-03-18

Family

ID=12328322

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56031333A Granted JPS57147856A (en) 1981-03-06 1981-03-06 Deflecting device of automatic astigmation compensation type

Country Status (1)

Country Link
JP (1) JPS57147856A (enExample)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4638142A (en) * 1984-10-22 1987-01-20 Total Compagnie Francaise Des Petroles Machine for electron-beam internal butt welding of tubes
JPS6288247A (ja) * 1985-10-14 1987-04-22 Fujitsu Ltd 電子ビ−ム露光装置
JPS62143354A (ja) * 1985-12-17 1987-06-26 Hitachi Ltd 偏向回路
JPH01296552A (ja) * 1988-05-24 1989-11-29 Hitachi Ltd イオンおよび電子ビーム複合装置
JP2005276819A (ja) * 2000-01-27 2005-10-06 Ict Integrated Circuit Testing Ges Fuer Halbleiterprueftechnik Mbh 帯電粒子ビームデバイスのための対物レンズ
JP2014194982A (ja) * 2013-03-28 2014-10-09 Jeol Ltd 荷電粒子ビーム偏向装置
WO2020183551A1 (ja) * 2019-03-08 2020-09-17 株式会社日立ハイテク 荷電粒子ビーム装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JOURRAL.OF.PHYSICS.E.SCIENTIFIC.LNSTRUNENTS.VOL.13=1980 *

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4638142A (en) * 1984-10-22 1987-01-20 Total Compagnie Francaise Des Petroles Machine for electron-beam internal butt welding of tubes
JPS6288247A (ja) * 1985-10-14 1987-04-22 Fujitsu Ltd 電子ビ−ム露光装置
JPS62143354A (ja) * 1985-12-17 1987-06-26 Hitachi Ltd 偏向回路
JPH01296552A (ja) * 1988-05-24 1989-11-29 Hitachi Ltd イオンおよび電子ビーム複合装置
JP2005276819A (ja) * 2000-01-27 2005-10-06 Ict Integrated Circuit Testing Ges Fuer Halbleiterprueftechnik Mbh 帯電粒子ビームデバイスのための対物レンズ
JP2014194982A (ja) * 2013-03-28 2014-10-09 Jeol Ltd 荷電粒子ビーム偏向装置
WO2020183551A1 (ja) * 2019-03-08 2020-09-17 株式会社日立ハイテク 荷電粒子ビーム装置
JPWO2020183551A1 (ja) * 2019-03-08 2021-11-25 株式会社日立ハイテク 荷電粒子ビーム装置
TWI753374B (zh) * 2019-03-08 2022-01-21 日商日立全球先端科技股份有限公司 荷電粒子束裝置
US11967482B2 (en) 2019-03-08 2024-04-23 Hitachi High-Tech Corporation Charged particle beam device

Also Published As

Publication number Publication date
JPS6312347B2 (enExample) 1988-03-18

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