ATE148263T1 - Sekundärionenmassenspektrometer zur analyse positiv und negativ geladener ionen - Google Patents

Sekundärionenmassenspektrometer zur analyse positiv und negativ geladener ionen

Info

Publication number
ATE148263T1
ATE148263T1 AT93103506T AT93103506T ATE148263T1 AT E148263 T1 ATE148263 T1 AT E148263T1 AT 93103506 T AT93103506 T AT 93103506T AT 93103506 T AT93103506 T AT 93103506T AT E148263 T1 ATE148263 T1 AT E148263T1
Authority
AT
Austria
Prior art keywords
secondary ions
mass spectrometer
sample
analyzing
separated
Prior art date
Application number
AT93103506T
Other languages
English (en)
Inventor
Kazuhiko Kaneko
Hideaki Hayashi
Kazutoshi Nagai
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Application granted granted Critical
Publication of ATE148263T1 publication Critical patent/ATE148263T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/0095—Particular arrangements for generating, introducing or analyzing both positive and negative analyte ions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/025—Detectors specially adapted to particle spectrometers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
AT93103506T 1992-03-04 1993-03-04 Sekundärionenmassenspektrometer zur analyse positiv und negativ geladener ionen ATE148263T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4081410A JPH05251039A (ja) 1992-03-04 1992-03-04 二次イオン質量分析計

Publications (1)

Publication Number Publication Date
ATE148263T1 true ATE148263T1 (de) 1997-02-15

Family

ID=13745570

Family Applications (1)

Application Number Title Priority Date Filing Date
AT93103506T ATE148263T1 (de) 1992-03-04 1993-03-04 Sekundärionenmassenspektrometer zur analyse positiv und negativ geladener ionen

Country Status (5)

Country Link
US (1) US5401965A (de)
EP (1) EP0559202B1 (de)
JP (1) JPH05251039A (de)
AT (1) ATE148263T1 (de)
DE (1) DE69307557T2 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9717877D0 (en) * 1997-08-26 1997-10-29 Ellis Richard J Order charge separation and order -charge type separation
WO2005024882A2 (en) * 2003-09-05 2005-03-17 Griffin Analytical Technologies Ion detection methods, mass spectrometry analysis methods, and mass spectrometry instrument circuitry
CA2570806A1 (en) * 2004-06-15 2006-01-05 Griffin Analytical Technologies, Inc. Analytical instruments, assemblies, and methods
DE602005006967D1 (de) * 2005-03-17 2008-07-03 Integrated Circuit Testing Analyse-System und Teilchenstrahlgerät
CN101317246A (zh) 2005-04-25 2008-12-03 格里芬分析技术有限责任公司 分析仪器、装置和方法
US7992424B1 (en) 2006-09-14 2011-08-09 Griffin Analytical Technologies, L.L.C. Analytical instrumentation and sample analysis methods
JP5196362B2 (ja) * 2007-07-23 2013-05-15 独立行政法人物質・材料研究機構 磁気構造解析方法とそれに使用するスピン偏極イオン散乱分光装置
US7855361B2 (en) * 2008-05-30 2010-12-21 Varian, Inc. Detection of positive and negative ions
GB0809950D0 (en) * 2008-05-30 2008-07-09 Thermo Fisher Scient Bremen Mass spectrometer
CN102706914B (zh) * 2012-06-29 2015-03-18 北京卫星环境工程研究所 介质材料二次电子发射系数测量系统及测量方法
TWI539154B (zh) * 2012-12-19 2016-06-21 英福康公司 雙重偵測殘餘氣體分析器
EP3201939B1 (de) * 2014-10-02 2021-03-03 908 Devices Inc. Massenspektrometrie durch detektion von positiv und negativ geladenen teilchen
US9564290B2 (en) 2014-11-18 2017-02-07 Hamilton Sundstrand Corporation Micro machined two dimensional faraday collector grid
DE102015106418B3 (de) * 2015-04-27 2016-08-11 Bruker Daltonik Gmbh Messung des elektrischen Stromverlaufs von Partikelschwärmen in Gasen und im Vakuum
CN105428199B (zh) * 2015-12-28 2017-12-01 中国计量科学研究院 质谱分析方法及具有大气压接口的质谱分析装置
CN106783505B (zh) * 2016-12-30 2018-11-20 聚光科技(杭州)股份有限公司 大气压离子源的真空接口
US10468239B1 (en) * 2018-05-14 2019-11-05 Bruker Daltonics, Inc. Mass spectrometer having multi-dynode multiplier(s) of high dynamic range operation

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE758925A (fr) * 1969-11-14 1971-04-16 Bayer Ag Procede pour l'analyse des surfaces de corps solides par spectrometrie de masse
DE2445711A1 (de) * 1973-10-03 1975-04-10 Hewlett Packard Co Ionen/elektronen-umwandler
US4066894A (en) * 1976-01-20 1978-01-03 University Of Virginia Positive and negative ion recording system for mass spectrometer
US4266127A (en) * 1978-12-01 1981-05-05 Cherng Chang Mass spectrometer for chemical ionization and electron impact ionization operation
JPS6190161A (ja) * 1984-10-09 1986-05-08 Seiko Instr & Electronics Ltd 集束イオンビ−ムのビ−ム形状調整方法
JPS6237860A (ja) * 1985-08-09 1987-02-18 Nippon Telegr & Teleph Corp <Ntt> 二次イオン質量分析計
JP2641437B2 (ja) * 1987-02-27 1997-08-13 株式会社日立製作所 荷電粒子線装置
US4988867A (en) * 1989-11-06 1991-01-29 Galileo Electro-Optics Corp. Simultaneous positive and negative ion detector
JP2586710B2 (ja) * 1990-09-07 1997-03-05 日本電気株式会社 ２次イオン質量分析方法

Also Published As

Publication number Publication date
DE69307557T2 (de) 1997-08-14
US5401965A (en) 1995-03-28
DE69307557D1 (de) 1997-03-06
JPH05251039A (ja) 1993-09-28
EP0559202A1 (de) 1993-09-08
EP0559202B1 (de) 1997-01-22

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Legal Events

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