JPS57147855A - Discharge plasma x-ray generator - Google Patents
Discharge plasma x-ray generatorInfo
- Publication number
- JPS57147855A JPS57147855A JP56032092A JP3209281A JPS57147855A JP S57147855 A JPS57147855 A JP S57147855A JP 56032092 A JP56032092 A JP 56032092A JP 3209281 A JP3209281 A JP 3209281A JP S57147855 A JPS57147855 A JP S57147855A
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- generator
- transformer
- switch
- discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004804 winding Methods 0.000 abstract 3
- 239000003990 capacitor Substances 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 2
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 230000000149 penetrating effect Effects 0.000 abstract 1
- 230000035515 penetration Effects 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
- H05G2/001—Production of X-ray radiation generated from plasma
- H05G2/003—Production of X-ray radiation generated from plasma the plasma being generated from a material in a liquid or gas state
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
PURPOSE:To prevent any increase of the process number, which might be caused due to waiting time, by adjusting the starting energy of a plasma generator close to the critical value of the plasma generation, and providing a means of producing creeping discharge on the inner wall of the penetrating hole of the said generator. CONSTITUTION:A Tesla coil 14 wound around a plasma generator 3 is connected to the secondary winding of a step-up transformer 15. The primary winding of the transformer 15 is provided with a series circuit consisting of a spark gap 16 and a capacitor C0, and the capacitor C0 is charged through a power source 17 and a switch S0. When generated energy of near the critical value of plasma generating energy is accumulated in the plasma generator 3 through a switch S, the disconnection of the switch S0 causes electric discharge, and a high voltage develops in the secondary winding of the transformer 15. As the result, a plasma 8 is generated due to creeping discharge developed on the inner wall of a penetration hole 7 of the plasma generator 3. Consequently, the number of the manufacture processes of a discharge plasma X-ray generator can be extremely decreased.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56032092A JPS57147855A (en) | 1981-03-06 | 1981-03-06 | Discharge plasma x-ray generator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56032092A JPS57147855A (en) | 1981-03-06 | 1981-03-06 | Discharge plasma x-ray generator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57147855A true JPS57147855A (en) | 1982-09-11 |
Family
ID=12349234
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56032092A Pending JPS57147855A (en) | 1981-03-06 | 1981-03-06 | Discharge plasma x-ray generator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57147855A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5880250A (en) * | 1981-11-09 | 1983-05-14 | Seiko Epson Corp | X-ray source device |
| FR2522879A1 (en) * | 1982-03-05 | 1983-09-09 | Suwa Seikosha Kk | DEVICE FOR GENERATING X-RAYS |
-
1981
- 1981-03-06 JP JP56032092A patent/JPS57147855A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5880250A (en) * | 1981-11-09 | 1983-05-14 | Seiko Epson Corp | X-ray source device |
| JPH0354423B2 (en) * | 1981-11-09 | 1991-08-20 | ||
| FR2522879A1 (en) * | 1982-03-05 | 1983-09-09 | Suwa Seikosha Kk | DEVICE FOR GENERATING X-RAYS |
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