JPS57145983A - Coaxial barrel sputtering device - Google Patents

Coaxial barrel sputtering device

Info

Publication number
JPS57145983A
JPS57145983A JP3064781A JP3064781A JPS57145983A JP S57145983 A JPS57145983 A JP S57145983A JP 3064781 A JP3064781 A JP 3064781A JP 3064781 A JP3064781 A JP 3064781A JP S57145983 A JPS57145983 A JP S57145983A
Authority
JP
Japan
Prior art keywords
target
barrel
shutter
shield
cylindrical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3064781A
Other languages
English (en)
Other versions
JPS6116346B2 (ja
Inventor
Kikuo Wakino
Suehiro Kato
Atsuo Senda
Tatsumi Shoji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP3064781A priority Critical patent/JPS57145983A/ja
Publication of JPS57145983A publication Critical patent/JPS57145983A/ja
Publication of JPS6116346B2 publication Critical patent/JPS6116346B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP3064781A 1981-03-04 1981-03-04 Coaxial barrel sputtering device Granted JPS57145983A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3064781A JPS57145983A (en) 1981-03-04 1981-03-04 Coaxial barrel sputtering device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3064781A JPS57145983A (en) 1981-03-04 1981-03-04 Coaxial barrel sputtering device

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP26662785A Division JPS61166966A (ja) 1985-11-26 1985-11-26 同軸バレルマグネトロンスパツタ装置

Publications (2)

Publication Number Publication Date
JPS57145983A true JPS57145983A (en) 1982-09-09
JPS6116346B2 JPS6116346B2 (ja) 1986-04-30

Family

ID=12309598

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3064781A Granted JPS57145983A (en) 1981-03-04 1981-03-04 Coaxial barrel sputtering device

Country Status (1)

Country Link
JP (1) JPS57145983A (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04231462A (ja) * 1990-06-29 1992-08-20 Leybold Ag 陰極スパッタリング装置
EP0703599A1 (fr) * 1994-09-22 1996-03-27 Saint-Gobain Vitrage Cathode rotative de pulvérisation cathodique à plusieurs cibles
WO2009129115A3 (en) * 2008-04-14 2010-01-21 Angstrom Sciences, Inc. Cylindrical magnetron
US8951394B2 (en) 2010-01-29 2015-02-10 Angstrom Sciences, Inc. Cylindrical magnetron having a shunt
JP2019044216A (ja) * 2017-08-31 2019-03-22 株式会社Ｓｃｒｅｅｎホールディングス 成膜装置および成膜方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51119797A (en) * 1975-03-25 1976-10-20 Ici Ltd Process for producing aromatic polyether
JPS53122473A (en) * 1977-04-01 1978-10-25 Olympus Optical Co Ltd Fluorescent photometric mecroscope

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51119797A (en) * 1975-03-25 1976-10-20 Ici Ltd Process for producing aromatic polyether
JPS53122473A (en) * 1977-04-01 1978-10-25 Olympus Optical Co Ltd Fluorescent photometric mecroscope

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04231462A (ja) * 1990-06-29 1992-08-20 Leybold Ag 陰極スパッタリング装置
EP0703599A1 (fr) * 1994-09-22 1996-03-27 Saint-Gobain Vitrage Cathode rotative de pulvérisation cathodique à plusieurs cibles
FR2725073A1 (fr) * 1994-09-22 1996-03-29 Saint Gobain Vitrage Cathode rotative de pulverisation cathodique a plusieurs cibles
WO2009129115A3 (en) * 2008-04-14 2010-01-21 Angstrom Sciences, Inc. Cylindrical magnetron
US8500972B2 (en) 2008-04-14 2013-08-06 Angstrom Sciences, Inc. Cylindrical magnetron
US8951394B2 (en) 2010-01-29 2015-02-10 Angstrom Sciences, Inc. Cylindrical magnetron having a shunt
US9812304B2 (en) 2010-01-29 2017-11-07 Angstrom Sciences, Inc. Method of fine tuning a magnetron sputtering electrode in a rotatable cylindrical magnetron sputtering device
JP2019044216A (ja) * 2017-08-31 2019-03-22 株式会社Ｓｃｒｅｅｎホールディングス 成膜装置および成膜方法

Also Published As

Publication number Publication date
JPS6116346B2 (ja) 1986-04-30

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