JPS57145977A - Formation of protective film - Google Patents
Formation of protective filmInfo
- Publication number
- JPS57145977A JPS57145977A JP3183981A JP3183981A JPS57145977A JP S57145977 A JPS57145977 A JP S57145977A JP 3183981 A JP3183981 A JP 3183981A JP 3183981 A JP3183981 A JP 3183981A JP S57145977 A JPS57145977 A JP S57145977A
- Authority
- JP
- Japan
- Prior art keywords
- protective film
- substrate
- target
- film
- formation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/12—Organic material
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Formation Of Insulating Films (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3183981A JPS57145977A (en) | 1981-03-04 | 1981-03-04 | Formation of protective film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3183981A JPS57145977A (en) | 1981-03-04 | 1981-03-04 | Formation of protective film |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57145977A true JPS57145977A (en) | 1982-09-09 |
JPH0112832B2 JPH0112832B2 (enrdf_load_html_response) | 1989-03-02 |
Family
ID=12342218
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3183981A Granted JPS57145977A (en) | 1981-03-04 | 1981-03-04 | Formation of protective film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57145977A (enrdf_load_html_response) |
-
1981
- 1981-03-04 JP JP3183981A patent/JPS57145977A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPH0112832B2 (enrdf_load_html_response) | 1989-03-02 |
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