JPS57140308A - Manufacture of granular silicon - Google Patents
Manufacture of granular siliconInfo
- Publication number
- JPS57140308A JPS57140308A JP2336981A JP2336981A JPS57140308A JP S57140308 A JPS57140308 A JP S57140308A JP 2336981 A JP2336981 A JP 2336981A JP 2336981 A JP2336981 A JP 2336981A JP S57140308 A JPS57140308 A JP S57140308A
- Authority
- JP
- Japan
- Prior art keywords
- gaseous
- sicl
- manufacture
- high purity
- fine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Silicon Compounds (AREA)
Abstract
PURPOSE: To manufacture fine silicon granules suitable for use as depositing nuclei used in the manufacture of high purity silicon granules in a fluidized bed reactor, by bringing a gaseous reaction product obtd. by the contact of hot high purity silicon with a gaseous chlorosilane into contact with a gaseous chlorosilane.
CONSTITUTION: A gaseous chlorosilane such as SiCl4 is introduced into a vertical type reactor 1 from an upper inlet and converted into SiCl2 by the contact with a high purity silicon rod 3 heated to 1,100W1,350°C. The formed SiCl2 is chemically unstable, and it is immediately decomposed into fine Si particles and SiCl4. The gaseous mixture is then reacted with a gaseous chlorosilane such as HSiCl3 fed from inlets 4 at about 1,000°C to grow Si on said fine Si particles, and the resulting granular silicon having the desired grain size is taken out of an outlet 7. By-produced HCl and the unreacted gas are discharged from a lower pipe 6.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2336981A JPS57140308A (en) | 1981-02-19 | 1981-02-19 | Manufacture of granular silicon |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2336981A JPS57140308A (en) | 1981-02-19 | 1981-02-19 | Manufacture of granular silicon |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57140308A true JPS57140308A (en) | 1982-08-30 |
Family
ID=12108630
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2336981A Pending JPS57140308A (en) | 1981-02-19 | 1981-02-19 | Manufacture of granular silicon |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57140308A (en) |
-
1981
- 1981-02-19 JP JP2336981A patent/JPS57140308A/en active Pending
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