JPS57121230A - Positioning device of cassette - Google Patents
Positioning device of cassetteInfo
- Publication number
- JPS57121230A JPS57121230A JP757781A JP757781A JPS57121230A JP S57121230 A JPS57121230 A JP S57121230A JP 757781 A JP757781 A JP 757781A JP 757781 A JP757781 A JP 757781A JP S57121230 A JPS57121230 A JP S57121230A
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- positioning pins
- contact
- individually
- prescribed position
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000002349 favourable effect Effects 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP757781A JPS57121230A (en) | 1981-01-21 | 1981-01-21 | Positioning device of cassette |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP757781A JPS57121230A (en) | 1981-01-21 | 1981-01-21 | Positioning device of cassette |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57121230A true JPS57121230A (en) | 1982-07-28 |
| JPH0328050B2 JPH0328050B2 (enrdf_load_stackoverflow) | 1991-04-17 |
Family
ID=11669660
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP757781A Granted JPS57121230A (en) | 1981-01-21 | 1981-01-21 | Positioning device of cassette |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57121230A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08203800A (ja) * | 1995-01-23 | 1996-08-09 | Toshiba Mach Co Ltd | 試料ホルダの固定装置 |
| KR100566821B1 (ko) * | 2002-11-20 | 2006-04-03 | 미래산업 주식회사 | 트레이 이송장치 |
| US7298585B1 (en) | 2003-12-31 | 2007-11-20 | Storage Technology Corporation | Storage medium load and unload apparatus with an impact diverter |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4403531B2 (ja) * | 2000-03-07 | 2010-01-27 | Toto株式会社 | 静電チャックユニットの製造方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5759324A (en) * | 1980-09-26 | 1982-04-09 | Toshiba Corp | Device for exposure of electron beam |
-
1981
- 1981-01-21 JP JP757781A patent/JPS57121230A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5759324A (en) * | 1980-09-26 | 1982-04-09 | Toshiba Corp | Device for exposure of electron beam |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08203800A (ja) * | 1995-01-23 | 1996-08-09 | Toshiba Mach Co Ltd | 試料ホルダの固定装置 |
| KR100566821B1 (ko) * | 2002-11-20 | 2006-04-03 | 미래산업 주식회사 | 트레이 이송장치 |
| US7298585B1 (en) | 2003-12-31 | 2007-11-20 | Storage Technology Corporation | Storage medium load and unload apparatus with an impact diverter |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0328050B2 (enrdf_load_stackoverflow) | 1991-04-17 |
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