JPS57115011A - Manufacture for surface acoustic wave element - Google Patents

Manufacture for surface acoustic wave element

Info

Publication number
JPS57115011A
JPS57115011A JP73281A JP73281A JPS57115011A JP S57115011 A JPS57115011 A JP S57115011A JP 73281 A JP73281 A JP 73281A JP 73281 A JP73281 A JP 73281A JP S57115011 A JPS57115011 A JP S57115011A
Authority
JP
Japan
Prior art keywords
film
etching
acoustic wave
surface acoustic
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP73281A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0145246B2 (enrdf_load_stackoverflow
Inventor
Koji Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP73281A priority Critical patent/JPS57115011A/ja
Publication of JPS57115011A publication Critical patent/JPS57115011A/ja
Publication of JPH0145246B2 publication Critical patent/JPH0145246B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP73281A 1981-01-08 1981-01-08 Manufacture for surface acoustic wave element Granted JPS57115011A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP73281A JPS57115011A (en) 1981-01-08 1981-01-08 Manufacture for surface acoustic wave element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP73281A JPS57115011A (en) 1981-01-08 1981-01-08 Manufacture for surface acoustic wave element

Publications (2)

Publication Number Publication Date
JPS57115011A true JPS57115011A (en) 1982-07-17
JPH0145246B2 JPH0145246B2 (enrdf_load_stackoverflow) 1989-10-03

Family

ID=11481898

Family Applications (1)

Application Number Title Priority Date Filing Date
JP73281A Granted JPS57115011A (en) 1981-01-08 1981-01-08 Manufacture for surface acoustic wave element

Country Status (1)

Country Link
JP (1) JPS57115011A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60149214A (ja) * 1984-01-17 1985-08-06 Hitachi Ltd 表面弾性波素子の電極
JPS62141807A (ja) * 1985-12-16 1987-06-25 Toshiba Corp 導体パタ−ンの製造方法
JPH02268505A (ja) * 1989-04-11 1990-11-02 Matsushita Electric Ind Co Ltd 弾性表面波デバイスの周波数調整方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5618429A (en) * 1979-07-23 1981-02-21 Nippon Telegr & Teleph Corp <Ntt> Minute electrode formation

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5618429A (en) * 1979-07-23 1981-02-21 Nippon Telegr & Teleph Corp <Ntt> Minute electrode formation

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60149214A (ja) * 1984-01-17 1985-08-06 Hitachi Ltd 表面弾性波素子の電極
JPS62141807A (ja) * 1985-12-16 1987-06-25 Toshiba Corp 導体パタ−ンの製造方法
JPH02268505A (ja) * 1989-04-11 1990-11-02 Matsushita Electric Ind Co Ltd 弾性表面波デバイスの周波数調整方法

Also Published As

Publication number Publication date
JPH0145246B2 (enrdf_load_stackoverflow) 1989-10-03

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