JPS57114826A - Sensor using piezoelectric oscillator - Google Patents

Sensor using piezoelectric oscillator

Info

Publication number
JPS57114826A
JPS57114826A JP56001395A JP139581A JPS57114826A JP S57114826 A JPS57114826 A JP S57114826A JP 56001395 A JP56001395 A JP 56001395A JP 139581 A JP139581 A JP 139581A JP S57114826 A JPS57114826 A JP S57114826A
Authority
JP
Japan
Prior art keywords
electrode
piezoelectric oscillator
response
oscillator
electric resistance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56001395A
Other languages
Japanese (ja)
Other versions
JPS6152412B2 (en
Inventor
Tetsuo Konno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seikosha KK
Original Assignee
Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seikosha KK filed Critical Seikosha KK
Priority to JP56001395A priority Critical patent/JPS57114826A/en
Publication of JPS57114826A publication Critical patent/JPS57114826A/en
Publication of JPS6152412B2 publication Critical patent/JPS6152412B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/32—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using change of resonant frequency of a crystal

Abstract

PURPOSE:To obtain a small-sized sensor which can give a direct digital process to an output, by forming a drive electrode on one surface of a piezoelectric oscillator and then forming a back electrode on the other surface with a material that varies the electric resistance in response to a detection object. CONSTITUTION:A back electrode is formed on a free surface of a piezoelectric oscillator containing a deive electrode only on its single surface with a material that varies the electric resistance in response to a subject of detection. An oscillating circuit is constituted with use of such piezoelectric oscillator, and an object is detected by making use of the variation of frequency caused by the function of the detection object. For instance, an oscillating circuit is consituted by a single surface drive type quartz oscillator Q, a C-MOS inverter V, a resistance R and a load capacity CL respectively. Then a back electrode Eb is formed on the free surface of the oscillator Q with a material varying its electric resistance in response to the detection object. In this case, CdS, CdSe, etc. is properly selected as the material of the electrode Eb for the photometric purpose; and In, Sb, etc. for the magnetic measurement and a thermistor, etc. for the measurement of temperature respectively.
JP56001395A 1981-01-08 1981-01-08 Sensor using piezoelectric oscillator Granted JPS57114826A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56001395A JPS57114826A (en) 1981-01-08 1981-01-08 Sensor using piezoelectric oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56001395A JPS57114826A (en) 1981-01-08 1981-01-08 Sensor using piezoelectric oscillator

Publications (2)

Publication Number Publication Date
JPS57114826A true JPS57114826A (en) 1982-07-16
JPS6152412B2 JPS6152412B2 (en) 1986-11-13

Family

ID=11500296

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56001395A Granted JPS57114826A (en) 1981-01-08 1981-01-08 Sensor using piezoelectric oscillator

Country Status (1)

Country Link
JP (1) JPS57114826A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0357932A (en) * 1989-07-27 1991-03-13 Agency Of Ind Science & Technol Crystal temperatuer sensor for cryogenic temperature
JPH04242183A (en) * 1991-01-17 1992-08-28 Murata Mfg Co Ltd Magnetism sensor
RU2469301C1 (en) * 2011-06-09 2012-12-10 Государственное Образовательное Учреждение Высшего Профессионального Образования "Омский Государственный Технический Университет" Gas sensor
RU2469300C1 (en) * 2011-05-20 2012-12-10 Государственное Образовательное Учреждение Высшего Профессионального Образования "Омский Государственный Технический Университет" Semiconductor gas analyser

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS528875A (en) * 1975-07-10 1977-01-24 Agency Of Ind Science & Technol Piezo-electric vibration element

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS528875A (en) * 1975-07-10 1977-01-24 Agency Of Ind Science & Technol Piezo-electric vibration element

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0357932A (en) * 1989-07-27 1991-03-13 Agency Of Ind Science & Technol Crystal temperatuer sensor for cryogenic temperature
JPH04242183A (en) * 1991-01-17 1992-08-28 Murata Mfg Co Ltd Magnetism sensor
RU2469300C1 (en) * 2011-05-20 2012-12-10 Государственное Образовательное Учреждение Высшего Профессионального Образования "Омский Государственный Технический Университет" Semiconductor gas analyser
RU2469301C1 (en) * 2011-06-09 2012-12-10 Государственное Образовательное Учреждение Высшего Профессионального Образования "Омский Государственный Технический Университет" Gas sensor

Also Published As

Publication number Publication date
JPS6152412B2 (en) 1986-11-13

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