JPS57114806A - Coaxial degree evaluating method - Google Patents

Coaxial degree evaluating method

Info

Publication number
JPS57114806A
JPS57114806A JP49981A JP49981A JPS57114806A JP S57114806 A JPS57114806 A JP S57114806A JP 49981 A JP49981 A JP 49981A JP 49981 A JP49981 A JP 49981A JP S57114806 A JPS57114806 A JP S57114806A
Authority
JP
Japan
Prior art keywords
coaxial degree
line scanner
rotated
beams
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP49981A
Other languages
Japanese (ja)
Inventor
Masaki Horiie
Sachiosa Moriwaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP49981A priority Critical patent/JPS57114806A/en
Publication of JPS57114806A publication Critical patent/JPS57114806A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/26Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G01B11/27Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
    • G01B11/272Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Mechanical Coupling Of Light Guides (AREA)

Abstract

PURPOSE:To realize the coaxial degree evaluation with high accuracy for microsample, by irradiating parallel beams to a cylindrical object to be measured which is rotated at a fixed position, enlarging the reflected or transmitted beams and then processing the signals which are detected by a line scanner. CONSTITUTION:The parallel beams are irradiated to the upper surface or the drilled hole of a cylindrical object to be measured which is rotated at a fixed position. The reflected or transmitted beams of the parallel beams are enlarged and received by a line scanner which is set at a prescribed position and having an array of a number of photodetectors of equal width. Then the minimum value is detected for the number of photodetectors for a period during which the output is erased or produced from the light receiving standard of the line scanner to be compared with a sample whose coaxial degree is previously known. Thus the coaxial degree is evaluated for a sample. For instance, a laser beam 18 is irradiated via a reflector 20 and from the lower part of a cylinder sample 29 which is supported and rotated by static voltage fluid bearings 1 and 2. This transmitted beam is enlarged by an optical system 22 and then received at a line scanner 23. Thus the coaxial degree is evaluated through the processes mentioned above.
JP49981A 1981-01-07 1981-01-07 Coaxial degree evaluating method Pending JPS57114806A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP49981A JPS57114806A (en) 1981-01-07 1981-01-07 Coaxial degree evaluating method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49981A JPS57114806A (en) 1981-01-07 1981-01-07 Coaxial degree evaluating method

Publications (1)

Publication Number Publication Date
JPS57114806A true JPS57114806A (en) 1982-07-16

Family

ID=11475444

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49981A Pending JPS57114806A (en) 1981-01-07 1981-01-07 Coaxial degree evaluating method

Country Status (1)

Country Link
JP (1) JPS57114806A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6194706U (en) * 1984-11-27 1986-06-18
CN110455227A (en) * 2019-09-17 2019-11-15 中国科学院长春光学精密机械与物理研究所 Four through axial bore coaxiality error detection method of telescope
CN114279328A (en) * 2021-12-24 2022-04-05 上海羿弓精密科技有限公司 Special measuring equipment of ultrahigh-precision RV reducer crankshaft

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6194706U (en) * 1984-11-27 1986-06-18
CN110455227A (en) * 2019-09-17 2019-11-15 中国科学院长春光学精密机械与物理研究所 Four through axial bore coaxiality error detection method of telescope
CN114279328A (en) * 2021-12-24 2022-04-05 上海羿弓精密科技有限公司 Special measuring equipment of ultrahigh-precision RV reducer crankshaft
CN114279328B (en) * 2021-12-24 2022-12-27 上海羿弓精密科技有限公司 Special measuring equipment of ultrahigh precision RV reduction gear bent axle

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