JPS57108859A - Exposing device for film carrier - Google Patents

Exposing device for film carrier

Info

Publication number
JPS57108859A
JPS57108859A JP55184350A JP18435080A JPS57108859A JP S57108859 A JPS57108859 A JP S57108859A JP 55184350 A JP55184350 A JP 55184350A JP 18435080 A JP18435080 A JP 18435080A JP S57108859 A JPS57108859 A JP S57108859A
Authority
JP
Japan
Prior art keywords
carrier
warpage
stand
vacuum
film carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP55184350A
Other languages
Japanese (ja)
Inventor
Koichi Chino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP55184350A priority Critical patent/JPS57108859A/en
Publication of JPS57108859A publication Critical patent/JPS57108859A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/707—Chucks, e.g. chucking or un-chucking operations or structural details

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE:To eliminate warpage and distortion of an image and to improve positioning accuracy and enable to expose the whole effective exposed area by subjecting a film carrier to stick to a setting stand with vacuum sucking. CONSTITUTION:In an exposing device for reducing a glass mask 1 to 1/2 size by a projecting lens 2 and to reflect onto a film carrier 3 putting upon a setting stand 4, a warpage is generated in a carrier film consisting of a copper foil and polyimide or polyester, as temp. is applied at a laminated photoresist coating process which is a precedent process of exposing process. Then, a vacuum hole 5 is provided in the stand 4 and the carrier 3 is sucked by vacuum only when it is exposed and the warpage is eliminated by sticking the carrier 3 onto the stand 4. Thereby, fine adjustment both of magnification and focus for every one foil according to the degree of warpage is unnecessary and improvement of positioning accuracy is attained.
JP55184350A 1980-12-25 1980-12-25 Exposing device for film carrier Pending JPS57108859A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55184350A JPS57108859A (en) 1980-12-25 1980-12-25 Exposing device for film carrier

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55184350A JPS57108859A (en) 1980-12-25 1980-12-25 Exposing device for film carrier

Publications (1)

Publication Number Publication Date
JPS57108859A true JPS57108859A (en) 1982-07-07

Family

ID=16151719

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55184350A Pending JPS57108859A (en) 1980-12-25 1980-12-25 Exposing device for film carrier

Country Status (1)

Country Link
JP (1) JPS57108859A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0443106A2 (en) * 1990-02-21 1991-08-28 Ushio Denki Exposure apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0443106A2 (en) * 1990-02-21 1991-08-28 Ushio Denki Exposure apparatus

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