JPS57106132A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS57106132A
JPS57106132A JP18353680A JP18353680A JPS57106132A JP S57106132 A JPS57106132 A JP S57106132A JP 18353680 A JP18353680 A JP 18353680A JP 18353680 A JP18353680 A JP 18353680A JP S57106132 A JPS57106132 A JP S57106132A
Authority
JP
Japan
Prior art keywords
pellet
semiconductor
semiconductor device
grindstone
machining accuracy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18353680A
Other languages
Japanese (ja)
Inventor
Yoshio Otsuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP18353680A priority Critical patent/JPS57106132A/en
Publication of JPS57106132A publication Critical patent/JPS57106132A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67092—Apparatus for mechanical treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Bipolar Transistors (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)

Abstract

PURPOSE:To enhance the machining accuracy of an apparatus for manufacturing a semiconductor device by providing means for setting a semiconductor pellet in parallel with the rotating plane of a grindstone axis and means for centering and holding the rotating axis of the pellet in a bevelling machine. CONSTITUTION:A semiconductor pallet is placed on a collet chuck, is projected on an upper jig 4 in contact, and a semiconductor element is centered by the collet chuck 8 as a collet sleeve 9 rises. A grindstone 7 is contacted with the outer peripheral surface of the pellet to bevel the pellet. Even if the parallelism is not produced in the element in this manner, the side of the pellet surface can be used as a machining reference surface, thereby improving the machining accuracy, and the yield and workability can be enhanced.
JP18353680A 1980-12-24 1980-12-24 Manufacture of semiconductor device Pending JPS57106132A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18353680A JPS57106132A (en) 1980-12-24 1980-12-24 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18353680A JPS57106132A (en) 1980-12-24 1980-12-24 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS57106132A true JPS57106132A (en) 1982-07-01

Family

ID=16137539

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18353680A Pending JPS57106132A (en) 1980-12-24 1980-12-24 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS57106132A (en)

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