JPS5694520A - Magnetic recording medium - Google Patents

Magnetic recording medium

Info

Publication number
JPS5694520A
JPS5694520A JP17255379A JP17255379A JPS5694520A JP S5694520 A JPS5694520 A JP S5694520A JP 17255379 A JP17255379 A JP 17255379A JP 17255379 A JP17255379 A JP 17255379A JP S5694520 A JPS5694520 A JP S5694520A
Authority
JP
Japan
Prior art keywords
layer
film
magnetic thin
thin film
growing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17255379A
Other languages
Japanese (ja)
Inventor
Ryuji Sugita
Yoshiji Nakagawa
Norio Miyatake
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP17255379A priority Critical patent/JPS5694520A/en
Publication of JPS5694520A publication Critical patent/JPS5694520A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/225—Oblique incidence of vaporised material on substrate
    • C23C14/226—Oblique incidence of vaporised material on substrate in order to form films with columnar structure

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Magnetic Record Carriers (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)

Abstract

PURPOSE: To enable the recording reproducing of high recording density in low cost, by taking multilayer construction for magnetic thin film and making reverse the tilt of the direction of growing of column crystal in each layer to the normal of the groove film alternately.
CONSTITUTION: Magnetic thin film taking Co and Cr as major component is laminated for a plurality of layers with a slope vapor deposition method. For example, in 4-layer construction, the growing direction of column crystal of the 1st layer 15 and the 3rd layer 17 a tilted by θ to the film normal line, and the growing direction of column crystal of each layer is reverse alternately so that the 2nd layer 16 and the 4th layer 18 are tilted by θ toward reverse direction as the 1st layer 15 and the 3rd layer 17, so that the magnetizing easy axis can go to the vertical direction as the entire film. Thus, on the macromolecular base plate having lower heat resistance, the magnetic thin film having easy magnetization axis vertically to the film surface can be formed in high speed.
COPYRIGHT: (C)1981,JPO&Japio
JP17255379A 1979-12-28 1979-12-28 Magnetic recording medium Pending JPS5694520A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17255379A JPS5694520A (en) 1979-12-28 1979-12-28 Magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17255379A JPS5694520A (en) 1979-12-28 1979-12-28 Magnetic recording medium

Publications (1)

Publication Number Publication Date
JPS5694520A true JPS5694520A (en) 1981-07-31

Family

ID=15943988

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17255379A Pending JPS5694520A (en) 1979-12-28 1979-12-28 Magnetic recording medium

Country Status (1)

Country Link
JP (1) JPS5694520A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4677032A (en) * 1985-09-23 1987-06-30 International Business Machines Corporation Vertical magnetic recording media with multilayered magnetic film structure
US4874664A (en) * 1986-11-21 1989-10-17 Toyota Jidosha Kabushiki Kaisha Birefringent plate and manufacturing method for the same
JPH02152007A (en) * 1988-12-02 1990-06-12 Tdk Corp Magnetic recording medium
JPH02156421A (en) * 1988-12-09 1990-06-15 Tokin Corp Manufacture of two-layer medium for perpendicular magnetic recording
US5525398A (en) * 1991-03-22 1996-06-11 Tdk Corporation Perpendicular magnetic recording medium and method for making

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4677032A (en) * 1985-09-23 1987-06-30 International Business Machines Corporation Vertical magnetic recording media with multilayered magnetic film structure
US4874664A (en) * 1986-11-21 1989-10-17 Toyota Jidosha Kabushiki Kaisha Birefringent plate and manufacturing method for the same
JPH02152007A (en) * 1988-12-02 1990-06-12 Tdk Corp Magnetic recording medium
JPH02156421A (en) * 1988-12-09 1990-06-15 Tokin Corp Manufacture of two-layer medium for perpendicular magnetic recording
JPH0554174B2 (en) * 1988-12-09 1993-08-11 Tokin Corp
US5525398A (en) * 1991-03-22 1996-06-11 Tdk Corporation Perpendicular magnetic recording medium and method for making

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