JPS5693900A - Method and apparatus for automatically controlling split current intensity of rectifier for electroplating bath - Google Patents

Method and apparatus for automatically controlling split current intensity of rectifier for electroplating bath

Info

Publication number
JPS5693900A
JPS5693900A JP17664680A JP17664680A JPS5693900A JP S5693900 A JPS5693900 A JP S5693900A JP 17664680 A JP17664680 A JP 17664680A JP 17664680 A JP17664680 A JP 17664680A JP S5693900 A JPS5693900 A JP S5693900A
Authority
JP
Japan
Prior art keywords
rectifier
automatically controlling
current intensity
electroplating bath
split current
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17664680A
Other languages
English (en)
Inventor
Rorutsufu Rorufu
Nitsuchie Deetorefu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bayer Pharma AG
Original Assignee
Schering AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schering AG filed Critical Schering AG
Publication of JPS5693900A publication Critical patent/JPS5693900A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05F—SYSTEMS FOR REGULATING ELECTRIC OR MAGNETIC VARIABLES
    • G05F1/00—Automatic systems in which deviations of an electric quantity from one or more predetermined values are detected at the output of the system and fed back to a device within the system to restore the detected quantity to its predetermined value or values, i.e. retroactive systems
    • G05F1/10—Regulating voltage or current
    • G05F1/46—Regulating voltage or current wherein the variable actually regulated by the final control device is dc
    • G05F1/56—Regulating voltage or current wherein the variable actually regulated by the final control device is dc using semiconductor devices in series with the load as final control devices
    • G05F1/561—Voltage to current converters
JP17664680A 1979-12-19 1980-12-16 Method and apparatus for automatically controlling split current intensity of rectifier for electroplating bath Pending JPS5693900A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19792951708 DE2951708A1 (de) 1979-12-19 1979-12-19 Verfahren und vorrichtung zur automatischen regelung von teilstromstaerken eines gleichrichters

Publications (1)

Publication Number Publication Date
JPS5693900A true JPS5693900A (en) 1981-07-29

Family

ID=6089256

Family Applications (2)

Application Number Title Priority Date Filing Date
JP17664680A Pending JPS5693900A (en) 1979-12-19 1980-12-16 Method and apparatus for automatically controlling split current intensity of rectifier for electroplating bath
JP1989054532U Expired JPH0322275Y2 (ja) 1979-12-19 1989-05-15

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP1989054532U Expired JPH0322275Y2 (ja) 1979-12-19 1989-05-15

Country Status (6)

Country Link
US (1) US4461690A (ja)
JP (2) JPS5693900A (ja)
CA (1) CA1164942A (ja)
DE (1) DE2951708A1 (ja)
FR (1) FR2472299A1 (ja)
GB (1) GB2069003B (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999031304A1 (fr) * 1997-12-16 1999-06-24 Ebara Corporation Dispositif de plaquage et procede de confirmation d'alimentation en courant
JP2007046138A (ja) * 2005-08-12 2007-02-22 Electroplating Eng Of Japan Co ウエーハメッキ用電流分配装置

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3213838A1 (de) * 1982-04-15 1983-10-27 Philips Patentverwaltung Gmbh, 2000 Hamburg Integrierte schaltungsanordung mit einem spannungs-strom-wandler
DE3410875A1 (de) * 1984-03-22 1985-10-03 Schering AG, Berlin und Bergkamen, 1000 Berlin Verfahren zur messung der stromdichte in galvanikbaedern
US4545876A (en) * 1984-05-02 1985-10-08 United Technologies Corporation Method and apparatus for surface treating
US4659941A (en) * 1985-07-19 1987-04-21 The United States Of America As Represented By The Secretary Of The Air Force Power sensing device
DE3701493A1 (de) * 1987-01-20 1988-07-28 Nixdorf Computer Ag Schaltungsanordnung zum verteilen elektrischer speiseleistung auf mehrere funktionseinheiten
DE3732476A1 (de) * 1987-09-24 1989-04-13 Schering Ag Verfahren zur angleichung der teilstroeme in einem elektrolytischen bad
US4877972A (en) * 1988-06-21 1989-10-31 The Boeing Company Fault tolerant modular power supply system
US4868412A (en) * 1988-10-28 1989-09-19 Sundstrand Corporation Distributed control system
US5120418A (en) * 1989-08-25 1992-06-09 International Business Machines Corporation Lead frame plating apparatus for thermocompression bonding
DE4027026A1 (de) * 1990-08-27 1992-03-05 Heraeus Elektroden Vorrichtung zur elektrodenstromregelung fuer elektrolytische zwecke
DE4041598C1 (ja) * 1990-12-22 1992-06-25 Schering Ag Berlin Und Bergkamen, 1000 Berlin, De
US5200692A (en) * 1991-09-23 1993-04-06 The Boeing Company Apparatus for limiting current through a plurality of parallel transistors
US5208485A (en) * 1991-10-24 1993-05-04 The Boeing Company Apparatus for controlling current through a plurality of resistive loads
US5389214A (en) * 1992-06-19 1995-02-14 Water Regeneration Systems, Inc. Fluid treatment system employing electrically reconfigurable electrode arrangement
JP3196719B2 (ja) 1998-03-31 2001-08-06 日本電気株式会社 汚染防御用隔離ラインを有する半導体製造ライン、ウエハ搬送機構および半導体の製造方法
US6245583B1 (en) * 1998-05-06 2001-06-12 Texas Instruments Incorporated Low stress method and apparatus of underfilling flip-chip electronic devices
US6201374B1 (en) * 1998-05-14 2001-03-13 3Com Corporation Voltage regulation and power switching system
US6517689B1 (en) 1998-07-10 2003-02-11 Ebara Corporation Plating device
CN1262690C (zh) 1999-10-12 2006-07-05 埃托特克德国有限公司 用于向待电解处理工件供电的载体和电解处理工件的方法
DE10007799C1 (de) * 1999-10-12 2001-06-07 Atotech Deutschland Gmbh Zur Stromzuführung zu elektrolytisch zu behandelnden Werkstücken oder Gegenelektroden dienender Träger und Verfahren zur elektrolytischen Behandlung von Werkstücken
US6224721B1 (en) 1999-11-30 2001-05-01 Nelson Solid Temp, Inc. Electroplating apparatus
US6432282B1 (en) * 2000-03-02 2002-08-13 Applied Materials, Inc. Method and apparatus for supplying electricity uniformly to a workpiece
US6228665B1 (en) * 2000-06-20 2001-05-08 International Business Machines Corporation Method of measuring oxide thickness during semiconductor fabrication
US7642759B2 (en) * 2007-07-13 2010-01-05 Linear Technology Corporation Paralleling voltage regulators
JP5457010B2 (ja) * 2007-11-01 2014-04-02 アルメックスＰｅ株式会社 連続めっき処理装置
FR2937751B1 (fr) * 2008-10-27 2010-12-31 Ece Systeme d'equilibrage des courants traversant des transistors de puissance relies en parallele lors de l'ouverture
DE102012014985B4 (de) 2012-07-27 2014-08-21 GalvaConsult GmbH Verfahren und Vorrichtung zur Überwachung von Galvanisierströmen
US9804613B2 (en) * 2013-07-22 2017-10-31 The Boeing Company Parallel transistor circuit controller
US10020759B2 (en) 2015-08-04 2018-07-10 The Boeing Company Parallel modular converter architecture for efficient ground electric vehicles
JP7293765B2 (ja) * 2018-07-24 2023-06-20 富士フイルムビジネスイノベーション株式会社 めっき装置
KR102111304B1 (ko) * 2018-08-09 2020-05-18 (주)선우하이테크 정전류 제어기능을 갖는 전기 도금 시스템 및 방법

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49129845A (ja) * 1973-04-20 1974-12-12

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1042059A (en) * 1963-07-12 1966-09-07 Harold Martin Harmer Improvements relating to the electro-deposition of metals
JPS4111150Y1 (ja) * 1964-07-22 1966-05-25
US3470082A (en) * 1965-09-22 1969-09-30 Louis W Raymond Electroplating method and system
DE1800954A1 (de) * 1968-10-03 1970-06-11 Siemens Ag Kupferbad-Wanne
US3629548A (en) * 1971-01-18 1971-12-21 Henry V Rygiol Multiarc welding
US3675114A (en) * 1971-06-14 1972-07-04 Forbro Design Corp High current voltage/current regulator employing a plurality of parallel connected power transistors
JPS588778U (ja) * 1981-07-10 1983-01-20 株式会社東芝 空気調和機
JPS58192967U (ja) * 1982-06-17 1983-12-22 日本電気ホームエレクトロニクス株式会社 メツキ用バレル

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49129845A (ja) * 1973-04-20 1974-12-12

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999031304A1 (fr) * 1997-12-16 1999-06-24 Ebara Corporation Dispositif de plaquage et procede de confirmation d'alimentation en courant
US6500317B1 (en) 1997-12-16 2002-12-31 Ebara Corporation Plating apparatus for detecting the conductivity between plating contacts on a substrate
KR100576757B1 (ko) * 1997-12-16 2006-05-03 가부시키가이샤 에바라 세이사꾸쇼 도금장치
JP2007046138A (ja) * 2005-08-12 2007-02-22 Electroplating Eng Of Japan Co ウエーハメッキ用電流分配装置
JP4738094B2 (ja) * 2005-08-12 2011-08-03 日本エレクトロプレイテイング・エンジニヤース株式会社 ウエーハメッキ用電流分配装置

Also Published As

Publication number Publication date
CA1164942A (en) 1984-04-03
GB2069003A (en) 1981-08-19
US4461690A (en) 1984-07-24
FR2472299B1 (ja) 1984-11-23
DE2951708A1 (de) 1981-07-02
JPH0322275Y2 (ja) 1991-05-15
FR2472299A1 (fr) 1981-06-26
JPH0233267U (ja) 1990-03-01
GB2069003B (en) 1983-07-27
DE2951708C2 (ja) 1989-05-11

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