JPS5691230A - Resist material - Google Patents

Resist material

Info

Publication number
JPS5691230A
JPS5691230A JP16868479A JP16868479A JPS5691230A JP S5691230 A JPS5691230 A JP S5691230A JP 16868479 A JP16868479 A JP 16868479A JP 16868479 A JP16868479 A JP 16868479A JP S5691230 A JPS5691230 A JP S5691230A
Authority
JP
Japan
Prior art keywords
styrene
pattern
copolymer
polydispersion
aromatic ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16868479A
Other languages
English (en)
Inventor
Yoshitake Onishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP16868479A priority Critical patent/JPS5691230A/ja
Publication of JPS5691230A publication Critical patent/JPS5691230A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Polymerisation Methods In General (AREA)
JP16868479A 1979-12-25 1979-12-25 Resist material Pending JPS5691230A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16868479A JPS5691230A (en) 1979-12-25 1979-12-25 Resist material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16868479A JPS5691230A (en) 1979-12-25 1979-12-25 Resist material

Publications (1)

Publication Number Publication Date
JPS5691230A true JPS5691230A (en) 1981-07-24

Family

ID=15872548

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16868479A Pending JPS5691230A (en) 1979-12-25 1979-12-25 Resist material

Country Status (1)

Country Link
JP (1) JPS5691230A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08130213A (ja) * 1994-11-01 1996-05-21 Agency Of Ind Science & Technol ポリマーの相分離を利用した表面加工法
US20170186760A1 (en) * 2015-09-10 2017-06-29 Samsung Electronics Co., Ltd. Method for manufacturing semiconductor device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08130213A (ja) * 1994-11-01 1996-05-21 Agency Of Ind Science & Technol ポリマーの相分離を利用した表面加工法
US20170186760A1 (en) * 2015-09-10 2017-06-29 Samsung Electronics Co., Ltd. Method for manufacturing semiconductor device
US10381361B2 (en) 2015-09-10 2019-08-13 Samsung Electronics Co., Ltd. Method for manufacturing semiconductor device

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