JPS5691230A - Resist material - Google Patents
Resist materialInfo
- Publication number
- JPS5691230A JPS5691230A JP16868479A JP16868479A JPS5691230A JP S5691230 A JPS5691230 A JP S5691230A JP 16868479 A JP16868479 A JP 16868479A JP 16868479 A JP16868479 A JP 16868479A JP S5691230 A JPS5691230 A JP S5691230A
- Authority
- JP
- Japan
- Prior art keywords
- styrene
- pattern
- copolymer
- polydispersion
- aromatic ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Polymerisation Methods In General (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16868479A JPS5691230A (en) | 1979-12-25 | 1979-12-25 | Resist material |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16868479A JPS5691230A (en) | 1979-12-25 | 1979-12-25 | Resist material |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5691230A true JPS5691230A (en) | 1981-07-24 |
Family
ID=15872548
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16868479A Pending JPS5691230A (en) | 1979-12-25 | 1979-12-25 | Resist material |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5691230A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08130213A (ja) * | 1994-11-01 | 1996-05-21 | Agency Of Ind Science & Technol | ポリマーの相分離を利用した表面加工法 |
US20170186760A1 (en) * | 2015-09-10 | 2017-06-29 | Samsung Electronics Co., Ltd. | Method for manufacturing semiconductor device |
-
1979
- 1979-12-25 JP JP16868479A patent/JPS5691230A/ja active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08130213A (ja) * | 1994-11-01 | 1996-05-21 | Agency Of Ind Science & Technol | ポリマーの相分離を利用した表面加工法 |
US20170186760A1 (en) * | 2015-09-10 | 2017-06-29 | Samsung Electronics Co., Ltd. | Method for manufacturing semiconductor device |
US10381361B2 (en) | 2015-09-10 | 2019-08-13 | Samsung Electronics Co., Ltd. | Method for manufacturing semiconductor device |
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