JPS5690968A - Electroless plating control method and its device - Google Patents
Electroless plating control method and its deviceInfo
- Publication number
- JPS5690968A JPS5690968A JP16733479A JP16733479A JPS5690968A JP S5690968 A JPS5690968 A JP S5690968A JP 16733479 A JP16733479 A JP 16733479A JP 16733479 A JP16733479 A JP 16733479A JP S5690968 A JPS5690968 A JP S5690968A
- Authority
- JP
- Japan
- Prior art keywords
- plating
- concn
- soln
- plating soln
- refractive index
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Chemically Coating (AREA)
- Control Of Non-Electrical Variables (AREA)
Abstract
PURPOSE: To perform plating stable over a long period by measuring the concn. and refractive index of an electroless plating soln. and automatically replenishing the consuming components of the plating soln. or automatically refreshing part of the plating soln. by these.
CONSTITUTION: An electroless plating soln. 2 is taken out from a plating cell 1 and is circulated by a circulating pipe 6 provided with a concn. detector 3, a refractive index detector 4 and a pump 5. When the concn. of the plating metal ions etc. in the plating soln. decreases, the concn. detector detects this and operates the solenoid valve 19 of a replenisher replenishing mechanism 16 for consuming chemicals, thereby automatically replenishing the concn. decreased components of plating metal salt, reducing agent, pH controller, etc. Also, the conductivity of the plating soln. is measured with the refractive index detector 4, based on said results, it drives a scooping mechanism 20 which in turn causes part of the plating soln. to be scooped out by a pump 22 and a required amount to be scooped out from a replenishing mechanism 23, whereby the replenishers for consuming chemicals are supplied into the plating cell 1, thus the plating soln. is refreshed and the vat period is considerably prolonged.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (10)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16733479A JPS5952953B2 (en) | 1979-12-22 | 1979-12-22 | Electroless plating control method and device |
US06/204,046 US4353933A (en) | 1979-11-14 | 1980-11-04 | Method for controlling electroless plating bath |
GB8036232A GB2064827B (en) | 1979-11-14 | 1980-11-12 | Method and apparatus for controlling electroless plating bath |
FR8024166A FR2469466B1 (en) | 1979-11-14 | 1980-11-13 | METHOD AND APPARATUS FOR CONTROLLING BATHS USED FOR NON-ELECTROLYTIC COATINGS |
DE19803043066 DE3043066A1 (en) | 1979-11-14 | 1980-11-14 | METHOD AND DEVICE FOR CONTROLLING A BATH FOR ELECTRIC PLATING |
US06/352,550 US4406249A (en) | 1979-11-14 | 1982-02-26 | Apparatus for controlling electroless plating bath |
US06/352,549 US4406248A (en) | 1979-11-14 | 1982-02-26 | Apparatus for controlling electroless plating bath |
SG169/84A SG16984G (en) | 1979-11-14 | 1984-02-25 | Method and apparatus for controlling electroless plating bath |
HK64/85A HK6485A (en) | 1979-11-14 | 1985-01-24 | Method and apparatus for controlling electroless plating bath |
MY497/85A MY8500497A (en) | 1979-11-14 | 1985-12-30 | Method and apparatus for controlling electroless plating bath |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16733479A JPS5952953B2 (en) | 1979-12-22 | 1979-12-22 | Electroless plating control method and device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5690968A true JPS5690968A (en) | 1981-07-23 |
JPS5952953B2 JPS5952953B2 (en) | 1984-12-22 |
Family
ID=15847801
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16733479A Expired JPS5952953B2 (en) | 1979-11-14 | 1979-12-22 | Electroless plating control method and device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5952953B2 (en) |
-
1979
- 1979-12-22 JP JP16733479A patent/JPS5952953B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5952953B2 (en) | 1984-12-22 |
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