JPS5688666A - Twoocoordinate stepper motor - Google Patents

Twoocoordinate stepper motor

Info

Publication number
JPS5688666A
JPS5688666A JP14454280A JP14454280A JPS5688666A JP S5688666 A JPS5688666 A JP S5688666A JP 14454280 A JP14454280 A JP 14454280A JP 14454280 A JP14454280 A JP 14454280A JP S5688666 A JPS5688666 A JP S5688666A
Authority
JP
Japan
Prior art keywords
twoocoordinate
stepper motor
stepper
motor
twoocoordinate stepper
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14454280A
Other languages
English (en)
Japanese (ja)
Inventor
Yurugen Furuheruto Hansu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Original Assignee
Carl Zeiss Jena GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss Jena GmbH filed Critical Carl Zeiss Jena GmbH
Publication of JPS5688666A publication Critical patent/JPS5688666A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
    • B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18—Machines moving with multiple degrees of freedom

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Combustion & Propulsion (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Linear Motors (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)
  • Control Of Linear Motors (AREA)
JP14454280A 1979-10-17 1980-10-17 Twoocoordinate stepper motor Pending JPS5688666A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD21626679A DD146525B1 (de) 1979-10-17 1979-10-17 Zweikoordinatenschrittmotor

Publications (1)

Publication Number Publication Date
JPS5688666A true JPS5688666A (en) 1981-07-18

Family

ID=5520634

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14454280A Pending JPS5688666A (en) 1979-10-17 1980-10-17 Twoocoordinate stepper motor

Country Status (3)

Country Link
JP (1) JPS5688666A (de)
DD (1) DD146525B1 (de)
DE (1) DE3037648A1 (de)

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58501931A (ja) * 1981-11-12 1983-11-10 レスニコ−，ハ−バ−ト 制御電気駆動装置
JPS59110368A (ja) * 1982-12-09 1984-06-26 コントロール　データ　コーポレーシヨン 二軸リニアモ−タ
JPS61278913A (ja) * 1985-06-04 1986-12-09 Ntn Toyo Bearing Co Ltd 磁気浮上式位置決め装置
JPS62110469A (ja) * 1985-11-08 1987-05-21 Sony Corp Ｘ−ｙリニヤモ−タ
JPS63133859A (ja) * 1986-11-20 1988-06-06 Yamaha Corp モ−タ
JPS63259842A (ja) * 1987-04-17 1988-10-26 Pioneer Electronic Corp 光学式ピツクアツプの光学部品駆動装置
JPH0230120U (de) * 1988-08-15 1990-02-26
US6369400B2 (en) 1998-10-30 2002-04-09 International Business Machines Corporation Magnetic scanning or positioning system with at least two degrees of freedom
JP2002112526A (ja) * 2000-06-26 2002-04-12 Nikon Corp 平面モータ、ステージ位置決めシステム、露光装置
JP2009060782A (ja) * 2007-09-03 2009-03-19 Korea Inst Of Machinery & Materials 機械装置の平面ステージ移動装置
JP2009136136A (ja) * 2007-09-26 2009-06-18 Asml Netherlands Bv 合成キャリヤを有するローレンツアクチュエータを有するリソグラフィ装置
JP2010158156A (ja) * 2008-12-31 2010-07-15 Asml Holding Nv リニアモータの磁気シールド装置
JP2014140049A (ja) * 1998-09-18 2014-07-31 Gsi Group Corp 高速精密位置決め装置
WO2016104349A1 (ja) * 2014-12-26 2016-06-30 日本電産サンキョー株式会社 アクチュエータ
JP2016127789A (ja) * 2014-12-26 2016-07-11 日本電産サンキョー株式会社 アクチュエータ
CN109565233A (zh) * 2016-08-09 2019-04-02 日本电产三协株式会社 振动产生装置

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4458227A (en) * 1982-04-12 1984-07-03 Polaroid Corporation Electromagnetic actuators
US4506204A (en) * 1983-06-10 1985-03-19 The Perkin-Elmer Corporation Electro-magnetic apparatus
DE3481090D1 (de) * 1983-12-20 1990-02-22 Ibm Positioniervorrichtung.
DE3426473C1 (de) * 1984-07-18 1986-02-20 Hermann Dipl.-Geol. 3400 Göttingen Mader Auslesegerät für mikroskopische Objekte, insbesondere Mikrofossilien
GB8804991D0 (en) * 1988-03-02 1988-03-30 Williams Fairey Eng Ltd Improvements in electric motors
FR2648633B1 (fr) * 1989-06-16 1991-10-04 Moving Magnet Tech Actionneur electromagnetique monophase de faible encombrement
FR2654271B1 (fr) * 1989-11-06 1992-01-24 Moving Magnet Tech Actionneur electromagnetique monophase angulaire.
FR2655284A1 (fr) * 1989-12-01 1991-06-07 Vincenzi Henri De Table a deux deplacements orthogonaux a commande informatisee notamment pour microscope.
US5153494A (en) 1990-04-06 1992-10-06 International Business Machines Corp. Ultrafast electro-dynamic x, y and theta positioning stage
DE4231470C2 (de) 1992-09-19 2002-06-06 Leica Microsystems Modulares Mikroskopsystem
DE19511973A1 (de) * 1995-04-02 1996-12-05 Univ Ilmenau Tech Feldgeführter planarer Präzisionsantrieb
DE19645873C2 (de) * 1996-11-07 1998-09-10 Zeiss Carl Jena Gmbh Anordnung zur Kontrolle der Referenzposition eines Läufers eines planaren Schrittmotors
DE19712893A1 (de) * 1997-03-27 1998-10-01 Peter Dr Dittrich Asynchroner Mehrkoordinatenantrieb
EP0871284B1 (de) * 1997-04-11 2005-09-14 Etel S.A. X-Y Kreuztisch zur Verstellung von Lasten mit hoher Genauigkeit und sehr hoher Dynamik
CH691719A5 (fr) * 1997-04-11 2001-09-14 Etel Sa Table X-Y pour déplacer une charge, telle qu'un outil, selon deux directions perpendiculaires.
FR2786311B1 (fr) * 1998-11-20 2001-01-19 Moving Magnet Tech Actionneurs bidirectionnels
EP1238752B1 (de) * 2001-03-09 2005-06-01 Cross Hüller GmbH Werkzeugmaschine
JP3952207B2 (ja) * 2004-12-15 2007-08-01 株式会社タムロン アクチュエータ及びそれを備えたレンズユニット及びカメラ
DE102007035793A1 (de) 2007-07-04 2009-01-08 Institut für Mikroelektronik- und Mechatronik-Systeme gGmbH Präzisionsplanarpositionieranordnung
DE102007037886B4 (de) 2007-08-10 2014-01-23 Institut für Mikroelektronik- und Mechatronik-Systeme gGmbH Feldgeführter planarer Präzisionsantrieb mit einem luftgelagerten Läufer
EP2221668B1 (de) * 2009-02-24 2021-04-14 ASML Netherlands B.V. Lithographischer Apparat und Positionierungsanordnung
DE102011100153A1 (de) 2011-04-29 2012-10-31 Physik Instrumente GmbH & Co. KG Anordnung eines planaren 6D-Positionierers
DE102012207082A1 (de) 2012-04-27 2013-10-31 Physik Instrumente (Pi) Gmbh & Co. Kg Hochauflösende Positioniereinrichtung
NL2018266B1 (en) * 2017-01-31 2018-08-16 Ccm Beheer Bv Planar positioning device

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH436751A (de) * 1966-05-31 1967-05-31 Contraves Ag Koordinatograph
US3599020A (en) * 1970-02-27 1971-08-10 Ibm Linear actuator with alternating magnetic poles
DE2050861A1 (de) * 1970-10-16 1972-04-20 Breuer Elektronik Gmbh Elektrische Linearmaschine
DD129948A1 (de) * 1977-03-03 1978-02-15 Peter Dittrich Translatorischer gleichstromschrittmotor

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58501931A (ja) * 1981-11-12 1983-11-10 レスニコ−，ハ−バ−ト 制御電気駆動装置
JPS59110368A (ja) * 1982-12-09 1984-06-26 コントロール　データ　コーポレーシヨン 二軸リニアモ−タ
JPS61278913A (ja) * 1985-06-04 1986-12-09 Ntn Toyo Bearing Co Ltd 磁気浮上式位置決め装置
JPS62110469A (ja) * 1985-11-08 1987-05-21 Sony Corp Ｘ−ｙリニヤモ−タ
JPS63133859A (ja) * 1986-11-20 1988-06-06 Yamaha Corp モ−タ
JPS63259842A (ja) * 1987-04-17 1988-10-26 Pioneer Electronic Corp 光学式ピツクアツプの光学部品駆動装置
JPH0230120U (de) * 1988-08-15 1990-02-26
JP2014140049A (ja) * 1998-09-18 2014-07-31 Gsi Group Corp 高速精密位置決め装置
US6369400B2 (en) 1998-10-30 2002-04-09 International Business Machines Corporation Magnetic scanning or positioning system with at least two degrees of freedom
JP2002112526A (ja) * 2000-06-26 2002-04-12 Nikon Corp 平面モータ、ステージ位置決めシステム、露光装置
JP2009060782A (ja) * 2007-09-03 2009-03-19 Korea Inst Of Machinery & Materials 機械装置の平面ステージ移動装置
JP2009136136A (ja) * 2007-09-26 2009-06-18 Asml Netherlands Bv 合成キャリヤを有するローレンツアクチュエータを有するリソグラフィ装置
US8492935B2 (en) 2007-09-26 2013-07-23 Asml Netherlands B.V. Lithographic apparatus having a Lorentz actuator with a composite carrier
JP2010158156A (ja) * 2008-12-31 2010-07-15 Asml Holding Nv リニアモータの磁気シールド装置
US9130443B2 (en) 2008-12-31 2015-09-08 Asml Holding N.V. Linear motor magnetic shield apparatus
US9136751B2 (en) 2008-12-31 2015-09-15 Asml Holding N.V. Linear motor magnetic shield apparatus for lithographic systems
WO2016104349A1 (ja) * 2014-12-26 2016-06-30 日本電産サンキョー株式会社 アクチュエータ
JP2016127789A (ja) * 2014-12-26 2016-07-11 日本電産サンキョー株式会社 アクチュエータ
CN109565233A (zh) * 2016-08-09 2019-04-02 日本电产三协株式会社 振动产生装置

Also Published As

Publication number Publication date
DD146525A1 (de) 1981-02-11
DE3037648A1 (de) 1981-04-30
DD146525B1 (de) 1982-07-28
DE3037648C2 (de) 1989-07-06

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