JPS5687851A - Sensor - Google Patents

Sensor

Info

Publication number
JPS5687851A
JPS5687851A JP16535279A JP16535279A JPS5687851A JP S5687851 A JPS5687851 A JP S5687851A JP 16535279 A JP16535279 A JP 16535279A JP 16535279 A JP16535279 A JP 16535279A JP S5687851 A JPS5687851 A JP S5687851A
Authority
JP
Japan
Prior art keywords
evaporated
membrane
palladium
evaporating
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16535279A
Other languages
English (en)
Japanese (ja)
Other versions
JPS632054B2 (enrdf_load_stackoverflow
Inventor
Masahiro Nishikawa
Kuni Ogawa
Atsushi Abe
Satoshi Sekido
Shigeru Hayakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP16535279A priority Critical patent/JPS5687851A/ja
Publication of JPS5687851A publication Critical patent/JPS5687851A/ja
Publication of JPS632054B2 publication Critical patent/JPS632054B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP16535279A 1979-12-18 1979-12-18 Sensor Granted JPS5687851A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16535279A JPS5687851A (en) 1979-12-18 1979-12-18 Sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16535279A JPS5687851A (en) 1979-12-18 1979-12-18 Sensor

Publications (2)

Publication Number Publication Date
JPS5687851A true JPS5687851A (en) 1981-07-16
JPS632054B2 JPS632054B2 (enrdf_load_stackoverflow) 1988-01-16

Family

ID=15810721

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16535279A Granted JPS5687851A (en) 1979-12-18 1979-12-18 Sensor

Country Status (1)

Country Link
JP (1) JPS5687851A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS632054B2 (enrdf_load_stackoverflow) 1988-01-16

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