JPS5687851A - Sensor - Google Patents

Info

Publication number

JPS5687851A

JPS5687851A JP16535279A JP16535279A JPS5687851A JP S5687851 A JPS5687851 A JP S5687851A JP 16535279 A JP16535279 A JP 16535279A JP 16535279 A JP16535279 A JP 16535279A JP S5687851 A JPS5687851 A JP S5687851A

Authority

JP

Japan

Prior art keywords

evaporated

membrane

palladium

evaporating

electrodes

Prior art date

1979-12-18

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

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• 238000001704 evaporation Methods 0.000 abstract 7
• 239000012528 membrane Substances 0.000 abstract 6
• 239000000463 material Substances 0.000 abstract 4
• 238000009413 insulation Methods 0.000 abstract 3
• 229910044991 metal oxide Inorganic materials 0.000 abstract 3
• LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 abstract 2
• PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 abstract 2
• KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 abstract 2
• 230000035945 sensitivity Effects 0.000 abstract 2
• 239000000758 substrate Substances 0.000 abstract 2
• 238000007738 vacuum evaporation Methods 0.000 abstract 2
• RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract 1
• MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 abstract 1
• ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 abstract 1
• RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 abstract 1
• HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 abstract 1
• 230000001476 alcoholic effect Effects 0.000 abstract 1
• 229910052802 copper Inorganic materials 0.000 abstract 1
• 239000010949 copper Substances 0.000 abstract 1
• 229910001882 dioxygen Inorganic materials 0.000 abstract 1
• 235000019441 ethanol Nutrition 0.000 abstract 1
• 230000008020 evaporation Effects 0.000 abstract 1
• 238000010030 laminating Methods 0.000 abstract 1
• 229910052759 nickel Inorganic materials 0.000 abstract 1
• 229910052763 palladium Inorganic materials 0.000 abstract 1
• 239000000126 substance Substances 0.000 abstract 1
• 239000011135 tin Substances 0.000 abstract 1
• 229910052718 tin Inorganic materials 0.000 abstract 1
• 229910052719 titanium Inorganic materials 0.000 abstract 1
• 239000010936 titanium Substances 0.000 abstract 1
• 229910052725 zinc Inorganic materials 0.000 abstract 1
• 239000011701 zinc Substances 0.000 abstract 1