JPS568297B2 - - Google Patents
Info
- Publication number
- JPS568297B2 JPS568297B2 JP4324276A JP4324276A JPS568297B2 JP S568297 B2 JPS568297 B2 JP S568297B2 JP 4324276 A JP4324276 A JP 4324276A JP 4324276 A JP4324276 A JP 4324276A JP S568297 B2 JPS568297 B2 JP S568297B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4324276A JPS52126165A (en) | 1976-04-15 | 1976-04-15 | Measurement of crystal properties |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4324276A JPS52126165A (en) | 1976-04-15 | 1976-04-15 | Measurement of crystal properties |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52126165A JPS52126165A (en) | 1977-10-22 |
| JPS568297B2 true JPS568297B2 (xx) | 1981-02-23 |
Family
ID=12658417
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4324276A Granted JPS52126165A (en) | 1976-04-15 | 1976-04-15 | Measurement of crystal properties |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52126165A (xx) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6193796U (xx) * | 1984-11-26 | 1986-06-17 |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5574447A (en) * | 1978-12-01 | 1980-06-05 | Fujitsu Ltd | Method of measuring impurity concentration distribution of semiconductor wafer |
| JPS5798840A (en) * | 1980-12-12 | 1982-06-19 | Fujitsu Ltd | Devide for measuring concentration of semiconductor impurity |
| JPS60253856A (ja) * | 1984-05-30 | 1985-12-14 | Fujitsu Ltd | 炉芯管汚染監視方法 |
| JP2739943B2 (ja) * | 1987-11-06 | 1998-04-15 | 株式会社東芝 | 接合型半導体基板の検査方法および装置 |
-
1976
- 1976-04-15 JP JP4324276A patent/JPS52126165A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6193796U (xx) * | 1984-11-26 | 1986-06-17 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52126165A (en) | 1977-10-22 |