JPS52126165A - Measurement of crystal properties - Google Patents
Measurement of crystal propertiesInfo
- Publication number
- JPS52126165A JPS52126165A JP4324276A JP4324276A JPS52126165A JP S52126165 A JPS52126165 A JP S52126165A JP 4324276 A JP4324276 A JP 4324276A JP 4324276 A JP4324276 A JP 4324276A JP S52126165 A JPS52126165 A JP S52126165A
- Authority
- JP
- Japan
- Prior art keywords
- measurement
- crystal properties
- impurities
- crystal
- aid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4324276A JPS52126165A (en) | 1976-04-15 | 1976-04-15 | Measurement of crystal properties |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4324276A JPS52126165A (en) | 1976-04-15 | 1976-04-15 | Measurement of crystal properties |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52126165A true JPS52126165A (en) | 1977-10-22 |
JPS568297B2 JPS568297B2 (ja) | 1981-02-23 |
Family
ID=12658417
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4324276A Granted JPS52126165A (en) | 1976-04-15 | 1976-04-15 | Measurement of crystal properties |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52126165A (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5574447A (en) * | 1978-12-01 | 1980-06-05 | Fujitsu Ltd | Method of measuring impurity concentration distribution of semiconductor wafer |
JPS5798840A (en) * | 1980-12-12 | 1982-06-19 | Fujitsu Ltd | Devide for measuring concentration of semiconductor impurity |
JPS60253856A (ja) * | 1984-05-30 | 1985-12-14 | Fujitsu Ltd | 炉芯管汚染監視方法 |
JPH01122133A (ja) * | 1987-11-06 | 1989-05-15 | Toshiba Corp | 接合型半導体基板の検査方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6193796U (ja) * | 1984-11-26 | 1986-06-17 |
-
1976
- 1976-04-15 JP JP4324276A patent/JPS52126165A/ja active Granted
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5574447A (en) * | 1978-12-01 | 1980-06-05 | Fujitsu Ltd | Method of measuring impurity concentration distribution of semiconductor wafer |
JPS5798840A (en) * | 1980-12-12 | 1982-06-19 | Fujitsu Ltd | Devide for measuring concentration of semiconductor impurity |
JPS6337888B2 (ja) * | 1980-12-12 | 1988-07-27 | Fujitsu Ltd | |
JPS60253856A (ja) * | 1984-05-30 | 1985-12-14 | Fujitsu Ltd | 炉芯管汚染監視方法 |
JPH01122133A (ja) * | 1987-11-06 | 1989-05-15 | Toshiba Corp | 接合型半導体基板の検査方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS568297B2 (ja) | 1981-02-23 |
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