JPS568297B2 - - Google Patents

Info

Publication number
JPS568297B2
JPS568297B2 JP4324276A JP4324276A JPS568297B2 JP S568297 B2 JPS568297 B2 JP S568297B2 JP 4324276 A JP4324276 A JP 4324276A JP 4324276 A JP4324276 A JP 4324276A JP S568297 B2 JPS568297 B2 JP S568297B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4324276A
Other languages
Japanese (ja)
Other versions
JPS52126165A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4324276A priority Critical patent/JPS52126165A/ja
Publication of JPS52126165A publication Critical patent/JPS52126165A/ja
Publication of JPS568297B2 publication Critical patent/JPS568297B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP4324276A 1976-04-15 1976-04-15 Measurement of crystal properties Granted JPS52126165A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4324276A JPS52126165A (en) 1976-04-15 1976-04-15 Measurement of crystal properties

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4324276A JPS52126165A (en) 1976-04-15 1976-04-15 Measurement of crystal properties

Publications (2)

Publication Number Publication Date
JPS52126165A JPS52126165A (en) 1977-10-22
JPS568297B2 true JPS568297B2 (cs) 1981-02-23

Family

ID=12658417

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4324276A Granted JPS52126165A (en) 1976-04-15 1976-04-15 Measurement of crystal properties

Country Status (1)

Country Link
JP (1) JPS52126165A (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6193796U (cs) * 1984-11-26 1986-06-17

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5574447A (en) * 1978-12-01 1980-06-05 Fujitsu Ltd Method of measuring impurity concentration distribution of semiconductor wafer
JPS5798840A (en) * 1980-12-12 1982-06-19 Fujitsu Ltd Devide for measuring concentration of semiconductor impurity
JPS60253856A (ja) * 1984-05-30 1985-12-14 Fujitsu Ltd 炉芯管汚染監視方法
JP2739943B2 (ja) * 1987-11-06 1998-04-15 株式会社東芝 接合型半導体基板の検査方法および装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6193796U (cs) * 1984-11-26 1986-06-17

Also Published As

Publication number Publication date
JPS52126165A (en) 1977-10-22

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