JPS5681421A - Thermal type flowmeter - Google Patents

Thermal type flowmeter

Info

Publication number
JPS5681421A
JPS5681421A JP15900279A JP15900279A JPS5681421A JP S5681421 A JPS5681421 A JP S5681421A JP 15900279 A JP15900279 A JP 15900279A JP 15900279 A JP15900279 A JP 15900279A JP S5681421 A JPS5681421 A JP S5681421A
Authority
JP
Japan
Prior art keywords
pipe
surrounding body
space
heat
thermal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15900279A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6125292B2 (enrdf_load_stackoverflow
Inventor
Hajime Kano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP15900279A priority Critical patent/JPS5681421A/ja
Publication of JPS5681421A publication Critical patent/JPS5681421A/ja
Publication of JPS6125292B2 publication Critical patent/JPS6125292B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
JP15900279A 1979-12-06 1979-12-06 Thermal type flowmeter Granted JPS5681421A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15900279A JPS5681421A (en) 1979-12-06 1979-12-06 Thermal type flowmeter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15900279A JPS5681421A (en) 1979-12-06 1979-12-06 Thermal type flowmeter

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP3063781A Division JPS5735719A (en) 1981-03-03 1981-03-03 Thermal type flowmeter

Publications (2)

Publication Number Publication Date
JPS5681421A true JPS5681421A (en) 1981-07-03
JPS6125292B2 JPS6125292B2 (enrdf_load_stackoverflow) 1986-06-14

Family

ID=15684077

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15900279A Granted JPS5681421A (en) 1979-12-06 1979-12-06 Thermal type flowmeter

Country Status (1)

Country Link
JP (1) JPS5681421A (enrdf_load_stackoverflow)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4519246A (en) * 1981-12-21 1985-05-28 Advanced Semiconductor Materials International, N.V. Improved flow meter
JPS62129721A (ja) * 1985-11-30 1987-06-12 Nippon Tairan Kk 流量センサ
US5191793A (en) * 1984-03-12 1993-03-09 Tylan Corporation Fluid mass flow meter device with reduced attitude sensitivity
US5259243A (en) * 1991-01-04 1993-11-09 Dxl International, Inc. Flow sensor
US5347861A (en) * 1990-08-11 1994-09-20 Stec Inc. Thermal mass flow meter
JP2008215946A (ja) * 2007-03-01 2008-09-18 Shimadzu Corp 熱式質量流量計
WO2015041255A1 (ja) * 2013-09-18 2015-03-26 日立金属株式会社 流量センサ、それを用いた質量流量計及び質量流量制御装置並びに流量センサの製造方法
JP2016540988A (ja) * 2013-12-17 2016-12-28 ベルキン ビーブイＢｅｒｋｉｎ Ｂ．Ｖ． 熱式流量計

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4519246A (en) * 1981-12-21 1985-05-28 Advanced Semiconductor Materials International, N.V. Improved flow meter
US5191793A (en) * 1984-03-12 1993-03-09 Tylan Corporation Fluid mass flow meter device with reduced attitude sensitivity
JPS62129721A (ja) * 1985-11-30 1987-06-12 Nippon Tairan Kk 流量センサ
US5347861A (en) * 1990-08-11 1994-09-20 Stec Inc. Thermal mass flow meter
US5259243A (en) * 1991-01-04 1993-11-09 Dxl International, Inc. Flow sensor
JP2008215946A (ja) * 2007-03-01 2008-09-18 Shimadzu Corp 熱式質量流量計
WO2015041255A1 (ja) * 2013-09-18 2015-03-26 日立金属株式会社 流量センサ、それを用いた質量流量計及び質量流量制御装置並びに流量センサの製造方法
JPWO2015041255A1 (ja) * 2013-09-18 2017-03-02 日立金属株式会社 流量センサ、それを用いた質量流量計及び質量流量制御装置並びに流量センサの製造方法
US10352746B2 (en) 2013-09-18 2019-07-16 Hitachi Metals, Ltd. Mass flow meter including organic-material covering layers
JP2016540988A (ja) * 2013-12-17 2016-12-28 ベルキン ビーブイＢｅｒｋｉｎ Ｂ．Ｖ． 熱式流量計

Also Published As

Publication number Publication date
JPS6125292B2 (enrdf_load_stackoverflow) 1986-06-14

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