JPS5681421A - Thermal type flowmeter - Google Patents
Thermal type flowmeterInfo
- Publication number
- JPS5681421A JPS5681421A JP15900279A JP15900279A JPS5681421A JP S5681421 A JPS5681421 A JP S5681421A JP 15900279 A JP15900279 A JP 15900279A JP 15900279 A JP15900279 A JP 15900279A JP S5681421 A JPS5681421 A JP S5681421A
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- surrounding body
- space
- heat
- thermal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Volume Flow (AREA)
Abstract
PURPOSE:To achieve the balance of temperature at both end parts through thermal connection of both end parts of a pipe by providing a surrounding body made of a goove conductor of heat and further to uniformalize the distribution of temperature in the inside space of the surrounding body by giving the function of thermal reflection to the inside thereof. CONSTITUTION:The pipe 1 passing fluid to be measured through is wound by coils 2 and 3 formed of heat-sensitive resisting wires and is fitted with the surrounding body 9 made of a goove conductor of heat with the 1st space 11 provided appropriately between the two coils. The surrounding body 9 is connected thermally with the pipe 1 at the parts of the flow-in side (b) and flow-out side (c) thereof. The surrounding body 9 is given the function of thermal reflection on the inside surface 9a thereof and further an outside enclosing body 10 provided with the 2nd space 12 is fitted to the pipe 1. The thermal convection inside the spaces 11 and 12 is prevented by evacuating them. By this constitution, the distribution of temperature inside the space 11 including the pipe 1 is uniformalized.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15900279A JPS5681421A (en) | 1979-12-06 | 1979-12-06 | Thermal type flowmeter |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15900279A JPS5681421A (en) | 1979-12-06 | 1979-12-06 | Thermal type flowmeter |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3063781A Division JPS5735719A (en) | 1981-03-03 | 1981-03-03 | Thermal type flowmeter |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5681421A true JPS5681421A (en) | 1981-07-03 |
JPS6125292B2 JPS6125292B2 (en) | 1986-06-14 |
Family
ID=15684077
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15900279A Granted JPS5681421A (en) | 1979-12-06 | 1979-12-06 | Thermal type flowmeter |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5681421A (en) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4519246A (en) * | 1981-12-21 | 1985-05-28 | Advanced Semiconductor Materials International, N.V. | Improved flow meter |
JPS62129721A (en) * | 1985-11-30 | 1987-06-12 | Nippon Tairan Kk | Flow rate sensor |
US5191793A (en) * | 1984-03-12 | 1993-03-09 | Tylan Corporation | Fluid mass flow meter device with reduced attitude sensitivity |
US5259243A (en) * | 1991-01-04 | 1993-11-09 | Dxl International, Inc. | Flow sensor |
US5347861A (en) * | 1990-08-11 | 1994-09-20 | Stec Inc. | Thermal mass flow meter |
JP2008215946A (en) * | 2007-03-01 | 2008-09-18 | Shimadzu Corp | Thermal mass flowmeter |
WO2015041255A1 (en) * | 2013-09-18 | 2015-03-26 | 日立金属株式会社 | Flow sensor, mass flow meter and mass flow control device using same, and production method for flow sensor |
JP2016540988A (en) * | 2013-12-17 | 2016-12-28 | ベルキン ビーブイBerkin B.V. | Thermal flow meter |
-
1979
- 1979-12-06 JP JP15900279A patent/JPS5681421A/en active Granted
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4519246A (en) * | 1981-12-21 | 1985-05-28 | Advanced Semiconductor Materials International, N.V. | Improved flow meter |
US5191793A (en) * | 1984-03-12 | 1993-03-09 | Tylan Corporation | Fluid mass flow meter device with reduced attitude sensitivity |
JPS62129721A (en) * | 1985-11-30 | 1987-06-12 | Nippon Tairan Kk | Flow rate sensor |
JPH068739B2 (en) * | 1985-11-30 | 1994-02-02 | 日本タイラン株式会社 | Flow sensor |
US5347861A (en) * | 1990-08-11 | 1994-09-20 | Stec Inc. | Thermal mass flow meter |
US5259243A (en) * | 1991-01-04 | 1993-11-09 | Dxl International, Inc. | Flow sensor |
JP2008215946A (en) * | 2007-03-01 | 2008-09-18 | Shimadzu Corp | Thermal mass flowmeter |
WO2015041255A1 (en) * | 2013-09-18 | 2015-03-26 | 日立金属株式会社 | Flow sensor, mass flow meter and mass flow control device using same, and production method for flow sensor |
JPWO2015041255A1 (en) * | 2013-09-18 | 2017-03-02 | 日立金属株式会社 | Flow sensor, mass flow meter and mass flow controller using the same, and method for manufacturing flow sensor |
US10352746B2 (en) | 2013-09-18 | 2019-07-16 | Hitachi Metals, Ltd. | Mass flow meter including organic-material covering layers |
JP2016540988A (en) * | 2013-12-17 | 2016-12-28 | ベルキン ビーブイBerkin B.V. | Thermal flow meter |
Also Published As
Publication number | Publication date |
---|---|
JPS6125292B2 (en) | 1986-06-14 |
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